Tunable Interference Filter Groove Airflow Response
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Solution Overview
Problem
Tunable interference filters face reduced responsiveness due to air resistance when moving mirrors change gap dimensions, leading to longer times in obtaining transmission light of desired wavelengths.
Innovation Solution
Incorporating groove parts on the substrates to allow air in the gap to flow outside, minimizing air resistance and enabling faster movement of reflection films, with radially formed groove parts at equal angles from the center to ensure balanced air flow and maintain film parallelism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the gap dimension between the fixed mirror and the movable mirror is changed to obtain transmission light of a desired wavelength, then the filter can selectively transmit specific wavelengths, but air resistance acts on the movable mirror during movement, increasing the time required to change wavelengths and reducing responsiveness
Solution Approach 1:
The patent divides the sealed cavity into multiple independent micro-cavities separated by partition walls. This segmentation allows air to be evacuated from each micro-cavity independently, reducing the total air resistance acting on the movable mirror during wavelength changes, thereby improving response time while maintaining the filter's wavelength selection capability.
Solution Approach 2:
The patent introduces porous silica layers or porous coating films within the cavity structure. These porous materials provide channels for air evacuation while maintaining structural integrity, allowing air to escape during movable mirror displacement, thus reducing air resistance and improving the filter's responsiveness without compromising its optical filtering function.
2Reliability
If the channel in which air is pushed is long or narrow, then the structural integrity of the filter is maintained, but air resistance acts in the direction of movable mirror movement, increasing the time required for wavelength changes
Solution Approach 1:
The patent segments the long narrow channel into multiple shorter micro-cavities separated by partition walls. This segmentation reduces the effective length of air pathways, allowing air to be pushed out more efficiently during movable mirror movement, thereby increasing movement speed while maintaining structural integrity through the distributed partition wall structure.
Solution Approach 2:
The patent introduces partition walls that create additional spatial dimensions within the cavity. By adding these intermediate structures, the air evacuation path is reorganized from a single long narrow channel into multiple shorter pathways, reducing air resistance and improving mirror movement speed while preserving overall structural strength.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the time required for reflection films to come closer, enhancing the responsiveness of the filter by minimizing air resistance and maintaining accurate alignment, thus improving the filter's ability to quickly obtain transmission light of desired wavelengths.
Implementation Method 1
the groove part is provided in at least one of the opposing surfaces of the first substrate and the second substrate, and a space forming the gap between the first reflection film and the second reflection film and an outside (an exterior of the filter) communicate via the groove part. When the first reflection film and the second reflection film move closer, the air in the space forming the gap flows through the groove part to the outside of the tunable interference filter.
Implementation Method 2
a first reflection film formed on a surface of the first substrate facing the second substrate, a second reflection film provided on the second substrate and opposed to the first reflection film across a gap. The tunable interference filter extracts light having a specific wavelength from light having plural wavelengths.
Data Source
AI summary
A filter includes a fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode provided on the surface of the fixed substrate facing the movable substrate, a second electrode provided on the movable substrate and opposed to the first electrode, bonding parts provided on opposing surfaces of the fixed and movable substrates and bonding the fixed substrate to the movable substrate, and a groove part provided in at least one of the opposing surfaces, and the gap is in communication with an exterior of the filter via the groove part.