Filter Membrane Analysis for Real-Time Filtration Accuracy
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Solution Overview
Problem
Existing filter membranes in semiconductor manufacturing often fail to accurately filter out specified particle sizes due to manufacturer technical specifications being unreliable, leading to increased scrap and material costs from defective semiconductor devices.
Innovation Solution
A system and method for testing filter membranes in real-time conditions using a non-destructive approach that analyzes the entire filter membrane, utilizing fluid flow and pressure measurements to determine pore sizes and distributions, providing updated technical specifications for accurate filter performance monitoring.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manufacturer technical specifications are used to determine filter performance, then filter selection is simplified, but the accuracy of particle filtration is compromised
Solution Approach 1:
The system performs preliminary testing of filter membranes before deployment using a non-destructive test method that measures actual pore size and distribution. This preliminary characterization creates accurate baseline data that replaces unreliable manufacturer specifications, enabling both easy filter selection and accurate performance prediction.
Solution Approach 2:
The invention changes the parameter basis for filter evaluation from manufacturer-stated specifications to empirically measured pore size distribution and flow characteristics. By measuring actual physical parameters (flow rate, pressure differential, pore size distribution) rather than relying on stated specifications, the system achieves both ease of selection and measurement precision.
2Reliability
If filters are replaced frequently to ensure reliability, then particle filtration reliability is improved, but material costs and waste increase
Solution Approach 1:
The system implements continuous monitoring of filter performance by measuring flow rate and pressure differential across the filter. This feedback provides real-time information about filter condition and actual particle penetration, enabling replacement only when performance degrades below acceptable thresholds, thus optimizing both reliability and material utilization.
Solution Approach 2:
By performing preliminary non-destructive testing to establish accurate baseline pore size and distribution, the system creates reliable reference data that enables precise determination of when filters actually need replacement. This eliminates premature replacement while maintaining reliability standards.
3Measurement precision
If traditional destructive testing methods are used to verify filter membrane pore sizes, then measurement accuracy is improved, but filter usability is lost
Solution Approach 1:
The invention replaces destructive mechanical sectioning and microscopy methods with a non-destructive fluid flow-based measurement system. By measuring flow rate and pressure differential through the intact filter membrane and using these data to calculate pore size distribution, the system achieves accurate measurement while preserving filter usability.
Solution Approach 2:
The filter membrane itself serves as the testing medium in the non-destructive method. The intact membrane is used both for measurement (by passing test fluid through it and measuring flow/pressure) and for subsequent deployment, eliminating the need to separate testing from the filter's service life.
4Reliability
If real-time filter performance monitoring is implemented, then defective device detection is improved, but system complexity increases
Solution Approach 1:
The monitoring system uses standard flow meters and pressure sensors that serve multiple functions in the semiconductor manufacturing process. These instruments monitor filter performance while also providing data for process control and optimization, thereby reducing overall system complexity despite the added monitoring capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces the likelihood of defective semiconductor devices by ensuring filters are replaced or regenerated at optimal times, minimizing scrap and material costs through more accurate and efficient filter performance monitoring.
Implementation Method 1
a filter configured to filter the fluid as the fluid passes through the filter
Implementation Method 2
a first particle counter configured to count particles in the fluid before the fluid passes through the filter
Implementation Method 3
a second particle counter configured to count the particles in the fluid after the fluid passes through the filter
Implementation Method 4
utilizing fluid flow and pressure measurements to determine pore sizes and distributions
Data Source
AI summary
The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.