Filter Membrane Analysis for Real-Time Filtration Verification
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Solution Overview
Problem
Existing filter membranes in semiconductor manufacturing often fail to accurately filter out specified particle sizes due to manufacturer technical specifications being unreliable, leading to increased scrap and material costs from defective semiconductor devices.
Innovation Solution
A system and method for testing filter membranes in real-time conditions using a non-destructive approach that analyzes the entire filter membrane, utilizing fluid flow and pressure measurements to determine pore sizes and distributions, providing updated technical specifications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manufacturer technical specifications are used to determine filter performance, then filter selection is simplified, but filtration accuracy deteriorates due to unreliable specifications
Solution Approach 1:
The system performs preliminary testing of filter membranes before deployment using a non-destructive testing method. A test fluid is passed through the filter membrane under controlled pressure, and the actual pore size distribution is measured in advance to verify it meets specifications before the filter is installed in the semiconductor manufacturing process.
Solution Approach 2:
The patent replaces reliance on manufacturer-provided mechanical specifications with an in-situ measurement system that directly measures pore size distribution using fluid flow characteristics. This substitution of indirect specification reliance with direct physical measurement ensures accurate filtration performance verification.
2Measurement precision
If traditional destructive testing methods are used to verify filter membrane pore sizes, then measurement accuracy improves, but filter usability deteriorates as the entire membrane must be destroyed for testing
Solution Approach 1:
Instead of destroying the entire filter membrane for testing, the system extracts only the necessary information (pore size distribution) by passing test fluid through the membrane and measuring flow characteristics. This extraction of measurement data without physical destruction allows the filter to remain usable after testing.
Solution Approach 2:
The filter membrane itself serves as the testing medium by allowing test fluid to pass through it under controlled pressure. The membrane's own structural properties are utilized during the testing process, eliminating the need for separate destructive analysis methods and enabling post-test reuse.
3Loss of time
If only partial samples of filter membranes are tested, then testing time is reduced, but measurement reliability deteriorates due to sampling variability
Solution Approach 1:
The testing system is designed to evaluate the entire filter membrane membrane's performance in a single test operation. By making the test fluid pass through the complete membrane surface area, the system achieves multi-functional evaluation of the entire filter rather than requiring multiple separate tests of different samples.
Solution Approach 2:
The testing process maintains continuous fluid flow through the entire filter membrane without interruption or sampling breaks. This continuous action ensures that every portion of the membrane is evaluated under identical conditions, providing comprehensive and reliable measurement data without the variability introduced by discrete sampling.
4Reliability
If real-time monitoring of filter performance is implemented, then defect detection improves, but system complexity increases due to additional sensors and monitoring infrastructure
Solution Approach 1:
The system implements feedback by continuously measuring pressure differential across the filter membrane and comparing it against expected values. When the pressure differential indicates pore blockage or degradation, the system provides feedback signals to alert operators or automatically adjust process parameters, enabling real-time defect detection without complex additional hardware.
Solution Approach 2:
The monitoring system utilizes the existing fluid flow through the filter membrane as the sensing mechanism. By measuring hydraulic pressure differential and flow rate changes, the system detects filter performance degradation using the process fluid itself, eliminating the need for separate optical or electronic sensors and reducing overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the likelihood of defective semiconductor devices by ensuring accurate filtration, minimizing scrap and material costs through more reliable filter performance monitoring.
Implementation Method 1
a filter configured to filter the fluid as the fluid passes through the filter
Implementation Method 2
utilizing fluid flow and pressure measurements to determine pore sizes and distributions
Data Source
AI summary
The present disclosure is directed to various methods and systems for monitoring real time efficiency of filters as well as testing the filters with tests that are similar to real world use of the filters to update technical specifications of the filters. The methods and systems monitoring the real time efficiency of the filters may utilize one or more particle counters to monitor their efficiency in real time. The data collected by the particle counters may be utilized to determine whether respective ones of the filters need to be replaced or regenerated by a backwash regeneration process. The updated technical specifications from the real world testing of the filters may be utilized in determining whether respective ones of the filters need to be replaced or regenerated. These real world testing and real time monitoring reduces the likelihood that workpieces are exposed to contaminant particles reducing scrap costs.