Filter Membrane Seal Treatment for Semiconductor Fluid Purity

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Solution Overview

Problem

In semiconductor manufacturing, existing filters fail to prevent leaching of filter materials into process liquids, leading to impurities redeposition in manufacturing processes, which can interfere with further processing steps.

Innovation Solution

A filter system with a chemically inert filter membrane and a seal material that cross-links to form a barrier, preventing leaching of filter materials into process liquids by modifying the surface tension and using a cross-linking reaction to seal the filter membrane, thereby isolating the process liquid from the filter material.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a filter membrane is used to filter process liquids, then filtration efficiency is improved, but material leaching into the process liquid occurs causing impurities

Engineering Contradiction:

Improvefiltration efficiencyVSAvoidmaterial leaching and impurities

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

A seal material is introduced as an intermediary layer between the filter membrane and the process liquid. This seal material cross-links to form a barrier that prevents direct contact between the process liquid and the filter membrane, thereby eliminating material leaching while preserving the filtration function.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The filter system becomes a composite structure combining the filter membrane and the cross-linked seal material. The seal material forms a chemically inert barrier layer that maintains the structural integrity of the filter membrane while preventing unwanted chemical interactions with the process liquid.

Inventive Principle:

Principle #40Composite materials

2Reliability

If filter material contacts process liquid, then filtration function is achieved, but chemical reactions cause leaching and redeposition

Engineering Contradiction:

Improvefiltration functionVSAvoidchemical reactions and redeposition

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The cross-linked seal material serves as a chemically inert intermediary that allows the filtration function to proceed while blocking harmful chemical reactions. The seal material's cross-linked structure prevents dissolution and redeposition of filter materials into the process liquid.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The cross-linked seal material creates a chemically inert environment between the filter membrane and the process liquid. This inert barrier prevents unwanted chemical reactions, leaching, and redeposition while allowing the filtration process to continue reliably.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

3Object-generated harmful factors

If seal material is applied to filter membrane, then leaching is prevented, but surface tension modification is required for effective sealing

Engineering Contradiction:

Improvematerial leachingVSAvoidsurface treatment process

Core Design Contradiction:

Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The surface tension of the seal material is modified through cross-linking to optimize its sealing performance. This parameter change enables the seal material to effectively bond with the filter membrane and form a reliable barrier against material leaching.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The physical act of sealing is enhanced by replacing simple mechanical contact with chemically active cross-linking. The cross-linking reaction creates strong chemical bonds between the seal material and filter membrane, substituting weak mechanical adhesion with robust chemical bonding.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces or eliminates material leaching from the filter membrane into the process liquid, minimizing impurities and improving the integrity of the manufacturing process by maintaining the chemical inertness of the filter material and enhancing the filtration efficiency.

Implementation Method 1

A cross-linking reaction is initiated within the coating material to seal the filter material

Methodology Applied

Scientific EffectCross-linking reaction: Chemical Bonding

Implementation Method 2

wherein the seal modifies a surface tension of the filter membrane to between about 30 dynes/cm and about 70 dynes/cm

Methodology Applied

Scientific EffectSurface tension modification: Surface Tension

Implementation Method 3

a filter membrane comprising a filter material is provided... A process liquid is filtered through the filter membrane

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Data Source

PatentUS11351509B2Filter with seal treatment

Publication Date: 2022.06.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

In accordance with an embodiment, a filter membrane is sealed with a sealing material prior to using the filter membrane to filter process fluids. The sealing material is a fluorine-based polymer or a polymer with a cross-linking group. Once the sealing material has been placed in contact with the filter membrane, a cross-linking reaction may be initiated using either physical or chemical processes to cross-link the sealing material and to seal the filter membrane within the sealing material, thereby separating the filter membrane from the process fluids, reducing or eliminating leaching of the filter membrane into the process fluid.