Filter Structure With Polymer Membrane And Mesoporous Silica Nanoparticles
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor manufacturing, there is a need for an effective filter structure that can remove contaminants from chemical materials used in the process chamber without impeding the flow of these materials, as existing solutions often compromise between contaminant removal and fluid flow rate.
Innovation Solution
A filter structure comprising a housing with a first filter using a polymer membrane and a second filter embedded with mesoporous silica nanoparticles (MSN) having functional groups, which are designed to effectively remove contaminants by sieving and adsorption, ensuring high purity of chemical materials while maintaining a suitable flow rate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter structure with small pore size is used to remove contaminants effectively, then contaminant removal efficiency is improved, but fluid flow rate decreases
Solution Approach 1:
The filter is divided into multiple filtering layers with different pore sizes and filtering mechanisms. The first layer uses a polymer membrane with larger pores for initial filtration, while the second layer uses MSN with smaller pores for fine filtration. This segmentation allows each layer to perform its specific function optimally without the entire filter structure blocking fluid flow excessively.
Solution Approach 2:
Mesoporous silica nanoparticles (MSN) with controlled pore sizes of 5-20 nm are used in the second filtering layer. These porous materials provide high surface area and adjustable pore sizes that enable effective contaminant removal while maintaining adequate fluid permeability, resolving the contradiction between filtration efficiency and flow rate.
2Reliability
If MSN with small pore size (5-20 nm) is used for fine filtration, then small contaminants are removed, but fluid flow resistance increases
Solution Approach 1:
MSN with mesopore sizes of 5-20 nm are used, which are larger than micropores but small enough to trap fine contaminants. The mesoporous structure provides an optimal balance between pore size for contaminant capture and sufficient open space for fluid flow, reducing flow resistance compared to microporous materials.
Solution Approach 2:
The filter is segmented so that the MSN layer is positioned after the polymer membrane layer. This arrangement allows the MSN to handle only the fine filtration of small contaminants from the pre-filtered fluid, rather than dealing with all contaminant sizes simultaneously, thereby maintaining lower flow resistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed filter structure efficiently removes contaminants such as metals, organic molecules, and oils from chemical materials, preventing defects in semiconductor devices while maintaining a relatively high flow rate, thereby addressing the limitations of existing technologies.
Implementation Method 1
a first filter primarily filtering a first fluid supplied from the supply source and including a polymer membrane
Implementation Method 2
a second filter secondarily filtering a second fluid filtered by the first filter and including mesoporous silica nanoparticles having a functional group on a surface thereof
Implementation Method 3
mesoporous silica nanoparticles having a functional group on a surface thereof
Data Source
AI summary
A filter structure includes a housing having an inlet and an outlet; a first filter embedded in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing; and a second filter embedded in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN).