Integrated Filter Probe Card for Accurate RFIC Signal Testing

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Solution Overview

Problem

Existing semiconductor testing technologies face challenges in accurately measuring signals in radio frequency integrated circuits (RFICs due to external or mutual interferences.

Innovation Solution

A probe card with integrated filters on the substrate to eliminate interference signals, including microstrip or substrate integrated waveguide filters, coupled with signal probes to ensure accurate signal measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional probe cards without filters are used for RFIC testing, then the testing process is simple, but interference signals from external sources and mutual interferences between adjacent probes cause measurement inaccuracies

Engineering Contradiction:

Improvesignal measurement accuracyVSAvoidprobe card structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces filters as intermediary components between the probes and the signal measurement system. These filters act as mediators that selectively pass desired signal frequencies while blocking interference signals, thereby improving measurement accuracy without requiring fundamental changes to the probe card architecture

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent applies different filtering characteristics to different regions or channels of the probe card based on their specific interference profiles. Each probe channel can be equipped with filters tailored to its frequency range and interference sources, optimizing signal quality locally while maintaining overall system simplicity

Inventive Principle:

Principle #3Local quality

2Productivity

If multiple probes are placed closely together to test high-density RFICs, then testing capability increases, but mutual interference between adjacent probes worsens

Engineering Contradiction:

Improvetesting capabilityVSAvoidmutual interference between probes

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

Filters are positioned as intermediary elements between closely spaced probes, preventing mutual interference from propagating between adjacent probe channels. This allows high-density probe arrangements to maintain their productivity benefits while the filters actively suppress the harmful electromagnetic coupling between neighboring probes

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs frequency-selective filtering to change the electrical characteristics of the probe card system. By introducing frequency-dependent impedance variations through the filters, desired signals are transmitted while interfering signals at different frequencies are attenuated, enabling close probe spacing without mutual interference

Inventive Principle:

Principle #35Parameter changes

3Measurement precision

If filtering components are added to eliminate interference signals, then measurement accuracy improves, but device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvesignal measurement accuracyVSAvoidprobe card fabrication

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

The patent integrates filters with the probe card substrate or probe structures themselves, merging multiple functions (signal transmission, filtering, and mechanical support) into unified components. This consolidation reduces the total component count and simplifies the manufacturing process while maintaining the interference rejection capabilities

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively eliminates interference, enabling precise electrical parameter and functional operation testing of RFICs, enhancing the reliability of semiconductor devices.

Implementation Method 1

at least one filter attached on the substrate, wherein the at least one filter is electrically coupled with the signal probe and configured to eliminate interference signals received from the signal probe

Methodology Applied

Scientific EffectElectromagnetic filtering: Filter (electronic)

Data Source

PatentUS20260002963A1Probe card and test apparatus

Publication Date: 2026.01.01 JCET STATS CHIPPAC KOREA LTD

AI summary

A probe card and a test apparatus are provided. The probe card may include: a substrate; a plurality of probes attached on the substrate and configured to contact conductive pads of a semiconductor device under test, wherein the plurality of probes includes a ground probe configured to contact a ground pad of the semiconductor device, and a signal probe configured to contact a signal pad of the semiconductor device; and at least one filter attached on the substrate, wherein the at least one filter is electrically coupled with the signal probe and configured to eliminate interference signals received from the signal probe.