Filter Retention Efficiency Testing in Ultrapure Water Systems
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Solution Overview
Problem
There is no effective method for testing the filter retention efficiency of filters used in ultrapure water systems in the semiconductor industry, which are crucial for maintaining high purity and preventing particle contamination.
Innovation Solution
A test system and method involving a container, passageways, liquid particle counters, an electronic pipet, and a robot arm are used to assess filter retention efficiency by comparing particle counts before and after the filter, utilizing a testing solution with known particle size and concentration, and monitoring pressure drops.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filtration is used to remove particles from ultrapure water immediately before point of use, then particle removal effectiveness is improved, but there is no method to test filter retention efficiency
Solution Approach 1:
The patent introduces a test solution containing particles of known size and concentration as an intermediary substance to evaluate filter performance. This test solution acts as a mediator between the filter and the measurement system, enabling indirect assessment of filter retention efficiency without directly measuring the filter's internal characteristics
Solution Approach 2:
The patent replaces direct mechanical inspection or complex filtration tests with an optical measurement system using liquid particle counters. By substituting mechanical evaluation methods with optical detection of particles before and after filtration, the system achieves precise measurement of filter retention efficiency
2Manufacturing precision
If strict particle removal is implemented in ultrapure water systems, then semiconductor production purity is improved, but filter performance cannot be verified
Solution Approach 1:
The patent establishes a feedback loop where particle counters measure particles in the feed solution and filtered solution, and this measurement data is used to calculate and verify filter retention efficiency. The system continuously monitors filter performance and provides feedback on whether the filter meets the required retention specifications
Solution Approach 2:
The test solution with known particle characteristics serves as an intermediary standard that bridges the gap between filter performance and manufacturing purity requirements. By using this intermediary reference material, the system can verify that filter performance is sufficient to achieve the required semiconductor production purity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the accurate determination of filter retention efficiency and pressure drop, ensuring the effectiveness of ultrapure water filtration systems in semiconductor manufacturing.
Implementation Method 1
detecting a first number of particles in a first testing solution... detecting a second number of particles in the first testing solution after the first testing solution has been passed through the filter
Implementation Method 2
passing the first testing solution through a filter... comparing particle counts before and after the filter
Data Source
AI summary
A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.