Filter Striking Module for Exhaust Gas Powder Clogging
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Solution Overview
Problem
Existing powder collection apparatuses in semiconductor manufacturing exhaust gas treatment face issues with filter clogging due to powder adherence, leading to increased differential pressure and disruption of the exhaust gas flow during traditional dedusting methods.
Innovation Solution
A filter striking module with a link structure is used to physically impact the filter, dislodging adherent powder and minimizing filter damage, while maintaining stable operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If high-pressure gas is sprayed to remove powder from the filter surface, then powder removal effectiveness is improved, but the flow of exhaust gas is disrupted and differential pressure increases
Solution Approach 1:
The patent replaces the pneumatic dedusting method (spraying high-pressure gas) with a mechanical striking method. A striking member physically impacts the filter surface to dislodge powder, eliminating the need for high-pressure gas injection that disrupts exhaust flow and increases differential pressure.
Solution Approach 2:
The patent introduces a striking member as an intermediary element between the control system and the filter. This striking member transfers mechanical impact to the filter surface, enabling powder removal without directly interfering with the exhaust gas flow path or requiring high-pressure gas injection.
2Object-generated harmful factors
If traditional dedusting methods are used, then powder removal is achieved, but filter damage occurs and operational time is reduced
Solution Approach 1:
The patent changes the physical parameters of the dedusting process by using controlled mechanical impact instead of high-pressure gas. The striking member applies localized mechanical force that is sufficient to remove powder but does not cause filter damage, thereby extending the filter's operational life.
3Object-generated harmful factors
If high-pressure gas spraying is used for dedusting, then powder is removed from the filter, but differential pressure increases and energy consumption rises
Solution Approach 1:
The patent substitutes the energy-intensive pneumatic dedusting system with a mechanically simpler striking mechanism. This replacement reduces the energy required for dedusting operations while maintaining effective powder removal capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively reduces filter pressure and extends the apparatus's operational time by preventing clogging, ensuring continuous and efficient exhaust gas treatment.
Implementation Method 1
a filter member that filters the exhaust gas
Implementation Method 2
a filter striking module that applies a physical impact to the filter body to dislodge powder adhering to the filter member
Data Source
AI summary
Provided in the present invention is an apparatus for collecting powder in exhaust gas comprising: a device for collecting powder contained in exhaust gas before the exhaust gas is introduced into a cylindrical adsorption reaction device that treats the exhaust gas using an adsorption reaction, wherein a cylindrical filter body includes a filter member that filters the exhaust gas and is disposed underneath the adsorption reaction device so as to be connected to the adsorption reaction device; a housing that provides an internal space to house the filter body, and a filter striking module that applies a physical impact to the filter body to dislodge powder adhering to the filter member.