Filter Unit Bubble Removal via Negative Pressure Decompression

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Solution Overview

Problem

Conventional filter wetting methods in semiconductor manufacturing require significant processing liquid consumption and prolonged start-up times due to inefficiencies in removing bubbles from filter units, which can lead to defects in miniaturized patterns during liquid processing.

Innovation Solution

A method involving a negative pressure deaeration process followed by atmospheric opening within the filter unit, where the inside of the filter unit is decompressed to a negative pressure atmosphere and then boosted to atmospheric pressure, allowing for efficient bubble removal and reduced liquid consumption, thereby shortening start-up times.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional positive pressure filtration is used to remove bubbles from the filter unit, then bubbles are removed, but processing liquid consumption increases and start-up time is prolonged

Engineering Contradiction:

Improvebubble removal effectivenessVSAvoidprocessing liquid consumption

Core Design Contradiction:

ReliabilityVSLoss of substance

Solution Approach 1:

The patent applies negative pressure (vacuum) to the secondary side of the filter unit to remove bubbles, inverting the conventional positive pressure approach. This allows bubbles to be drawn out through the filter element by the pressure differential, reducing processing liquid consumption while maintaining effective bubble removal

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent changes the pressure parameter from positive to negative on the secondary side of the filter unit. By applying a pressure lower than atmospheric pressure, the system creates a pressure differential that draws bubbles out through the filter element, improving bubble removal efficiency while reducing liquid consumption

Inventive Principle:

Principle #35Parameter changes

2Reliability

If conventional positive pressure filtration is used to remove bubbles from the filter unit, then bubbles are removed, but start-up time is prolonged

Engineering Contradiction:

Improvebubble removal effectivenessVSAvoidstart-up time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies negative pressure (vacuum) to the secondary side of the filter unit to remove bubbles, inverting the conventional positive pressure approach. This allows bubbles to be drawn out through the filter element by the pressure differential, accelerating the bubble removal process and reducing start-up time

Inventive Principle:

Principle #13The other way round (Inversion)

Solution Approach 2:

The patent uses negative pressure to rapidly draw bubbles through the filter element, rushing through the bubble removal process more quickly than conventional positive pressure methods. This reduces the time required for filter wetting and start-up operations

Inventive Principle:

Principle #21Skipping (Rushing through)

3Reliability

If processing liquid is flowed through the filter unit to remove bubbles, then bubbles are removed, but the amount of processing liquid consumed increases

Engineering Contradiction:

Improvebubble removal effectivenessVSAvoidprocessing liquid volume

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The patent applies negative pressure to the secondary side of the filter unit, inverting the conventional approach of using positive pressure to push liquid through. This allows bubbles to be removed by drawing them out through the filter element with minimal processing liquid flow, significantly reducing the volume of processing liquid consumed

Inventive Principle:

Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces the amount of processing liquid needed and accelerates the start-up process by quickly removing bubbles from the filter unit, improving processing efficiency and reducing costs associated with liquid consumption.

Implementation Method 1

decompressing inside of the filter unit into a first pressure atmosphere which is a negative pressure atmosphere in order to remove bubbles from the filter unit

Methodology Applied

Scientific EffectNegative pressure deaeration: Depressurisation

Implementation Method 2

a filter unit, and the nozzle provided sequentially from an upstream side... flowing the processing liquid into the filter unit from a primary side of the filter unit

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Data Source

PatentUS9975073B2Processing liquid supply method, processing liquid supply apparatus and storage medium

Publication Date: 2018.05.22 TOKYO ELECTRON LTD

AI summary

Disclosed are an apparatus and a method for reducing a processing liquid consumed for removing bubbles from a new filter unit, and shortening a start-up time when the filter unit is attached in a processing liquid supply passage. The method includes: filling the processing liquid into a new filter unit, decompressing inside of the filter unit into a first pressure atmosphere in order to remove bubbles from the filter unit, boosting a pressure of the inside of the filter unit, flowing the processing liquid into the filter unit from a primary side of the filter unit, and supplying the processing liquid flowing from the filter unit to an object to be processed through a nozzle thereby performing a liquid processing and quickly removing the bubbles.