Filter Vent Recirculation in Substrate Processing Liquid Supply
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Solution Overview
Problem
The treatment solution discharged from the vent port of a filter in substrate processing apparatuses contains particles and bubbles, leading to contamination and process defects, and often requires disposal, increasing manufacturing costs.
Innovation Solution
A substrate processing apparatus and method that include a liquid supply unit with a filter having an inlet, outlet, and vent port, where the treatment solution discharged from the vent port is circulated back to the inlet port for re-filtering, and a valve system controls the flow to prevent bubbles from entering the processing line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the treatment solution is discharged from the vent port of the filter, then bubbles are removed from the treatment solution, but the discharged treatment solution contains particles and contaminates the treatment solution
Solution Approach 1:
The vent port discharge is divided into two separate paths: a circulation line that returns treated solution to the tank and a drain line that discards contaminated solution. This segmentation allows the system to handle different portions of discharged liquid differently, recycling clean solution while removing contaminated portions.
Solution Approach 2:
The system recovers treatment solution by circulating it back to the tank through the circulation line, while simultaneously discarding the contaminated portion through the drain line. This selective recovery and discarding resolves the contradiction by preserving useful solution while removing harmful contaminants.
2Manufacturing precision
If the treatment solution discharged from the vent port is discarded, then contamination of the treatment solution is prevented, but the cost of substrate manufacturing increases
Solution Approach 1:
The discharge flow is segmented into two paths: a circulation line for recovering clean treatment solution and a drain line for removing contaminated solution. This allows partial recovery of valuable treatment solution while still managing contamination, reducing overall solution loss compared to complete discarding.
Solution Approach 2:
The system simultaneously recovers treatment solution through the circulation line and discards contaminated portions through the drain line. This balanced approach prevents complete loss of treatment solution while maintaining acceptable purity levels, resolving the contradiction between purity and loss.
3Loss of substance
If the treatment solution discharged from the vent port is reused, then manufacturing costs are reduced, but bubbles may cause process defects when flowing into the substrate treatment process
Solution Approach 1:
The vent port removes bubbles from the treatment solution before the liquid is circulated back to the tank through the circulation line. This preliminary bubble removal action ensures that the reused treatment solution is free from harmful bubbles, preventing process defects while enabling cost-effective reuse.
Solution Approach 2:
The vent port, which initially appears to be a source of contamination by discharging liquid, is actually converted into a beneficial device that removes bubbles from the treatment solution. The discharged liquid, after bubble removal, becomes suitable for recycling, transforming a potentially harmful process into a beneficial one.
4Manufacturing precision
If a filter is installed in the supply line, then the treatment solution is filtered, but the filter requires vent port discharge which creates contamination and bubble issues
Solution Approach 1:
The filter system is segmented with separate circulation and drain lines connected to the vent port. This segmentation manages the complexity by providing dedicated paths for different functions: circulation for recovery and drain for contamination removal, making the complex filter system more controllable and efficient.
Solution Approach 2:
The vent port acts as an intermediary device between the filter and the rest of the system, mediating the discharge of liquid and enabling the connection between the filter and both the circulation line and drain line. This intermediary role manages the complexity by providing a controlled interface for bubble removal and liquid discharge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces process defects and manufacturing costs by re-filtering and reusing the contaminated treatment solution, while preventing bubbles from causing further issues during the substrate processing.
Implementation Method 1
a filter installed between the tank and the supply line, in which the filter includes: an inlet port through which the treatment solution flows into the filter from the tank; an outlet port through which the treatment solution flows out from the filter to the liquid discharge unit
Implementation Method 2
a circulation line which is connected to the vent port of the filter and circulates the treatment solution discharged from the vent port of the filter to a line connected to the inlet port of the filter
Data Source
AI summary
The apparatus including a liquid discharge unit for discharging a treatment solution in a liquid form onto the substrate supported on a support unit in a processing space; and a liquid supply unit including a tank storing the treatment solution, a supply line connecting the tank and the liquid discharge unit, and a filter installed between the tank and the supply line, in which the filter includes a vent port for discharging a liquid containing bubbles to the outside of the filter, and the liquid supply unit further includes a circulation line which is connected to the vent port of the filter and circulates the treatment solution discharged from the vent port of the filter to a line connected to an inlet port of the filter.