Fin-Based Photodetector for Bandwidth Expansion

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Solution Overview

Problem

Current fiber optic network links face challenges in handling increased data volumes due to limited bandwidth, necessitating more efficient photodetector technologies that can enhance system performance.

Innovation Solution

A fin-based photodetector structure is developed, comprising an N-doped waveguide structure with a plurality of fins and a detector structure positioned laterally between them, along with N-doped and P-doped contact regions, formed using semiconductor-on-insulator substrates through epitaxial growth processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional semiconductor photodetector structures are used, then manufacturing processes are well-established, but bandwidth capacity is limited and cannot handle increased data volumes

Engineering Contradiction:
Improvebandwidth capacityVSAvoidphotodetector structure
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The photodetector structure is segmented into multiple fins arranged in an array, where each fin acts as an independent light-receiving element. This segmentation increases the total active area and bandwidth capacity while maintaining manufacturability through standardized fin geometry that can be produced using established semiconductor processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a planar photodetector structure to a three-dimensional fin array configuration. By extending the light-receiving surface vertically into multiple fins, the active area is dramatically increased without proportionally increasing the device footprint, thereby enhancing bandwidth capacity while using conventional manufacturing techniques.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If photodetector efficiency is increased to handle more data, then bandwidth improves, but manufacturing complexity and defect density increase

Engineering Contradiction:
Improvedata handling capacityVSAvoiddefect density
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The fin structure parameters (height, width, spacing) are optimized to achieve high light absorption efficiency while remaining compatible with standard semiconductor manufacturing capabilities. The N-doped waveguide structure parameters are specifically tuned to guide light effectively through the fin array, enabling high data handling capacity without requiring advanced manufacturing precision.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The detector structure is merged with the N-doped waveguide structure, where the waveguide serves dual functions of light guidance and structural support for the fin array. This integration simplifies the manufacturing process by reducing the number of separate components and assembly steps, thereby lowering defect density while maintaining high bandwidth capacity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The fin-based photodetector structure improves manufacturing efficiency and performance, potentially increasing bandwidth capacity and reducing defect density, making it suitable for high-data-volume applications.

Implementation Method 1

an N-doped waveguide structure defined in a semiconductor material, the N-doped waveguide structure comprising a plurality of first fins

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

When incident light from, for example, a laser or an optical fiber irradiates the photodetector, light photons in the incident light are absorbed by the photodetector. The absorption of the light photons results in the creation of electron-hole pairs in the depletion region of the photodetector.

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

performing at least one epitaxial growth process to form a detector structure on the N-doped waveguide structure

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Data Source

PatentUS11374143B2Fin-based photodetector structure
Publication Date: 2022.06.28 GLOBALFOUNDRIES US INC
  • US11374143B2 patent drawing
  • US11374143B2 patent drawing
  • US11374143B2 patent drawing

AI summary

One illustrative photodetector disclosed herein includes an N-doped waveguide structure defined in a semiconductor material, the N-doped waveguide structure comprising a plurality of first fins, and a detector structure positioned on the N-doped waveguide structure, wherein a portion of the detector structure is positioned laterally between the plurality of first fins. In this example, the photodetector also includes at least one N-doped contact region positioned in the semiconductor material and a P-doped contact region positioned in the detector structure.