Fin-Crossing Standard Cell Layout for Leakage Isolation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Integrated circuit manufacturing faces challenges in reducing the area of transistors and other circuit elements to increase functionality while minimizing manufacturing costs, as reducing inter-cell spacing increases leakage current and cross-talk, which in turn increases power consumption and decreases battery life.

Innovation Solution

The method involves selecting cells with specific border regions and fin structures, such as trench isolation and biasing techniques, to reduce leakage current by aligning fins across cell boundaries and optimizing gate electrode separation distances, thereby managing power loss and maintaining low power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If inter-cell spacing is reduced to increase transistor density, then area is reduced and functionality increases, but leakage current increases and power consumption increases

Engineering Contradiction:
Improveintegrated circuit areaVSAvoidleakage current
Core Design Contradiction:
Area of stationary objectVSLoss of energy

Solution Approach 1:

The patent divides the continuous active area into separate segmented active areas using trench isolation structures. These trenches physically segment the active region, preventing leakage current from flowing continuously between adjacent cells while maintaining tight cell spacing. The segmentation allows direct contact between cells for area reduction but inserts isolation barriers to block leakage paths.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The trench isolation structure acts as an intermediary element between adjacent active areas. Rather than allowing direct contact between active regions (which would cause leakage), the trench isolation serves as a mediating structure that enables close spacing while blocking harmful leakage current. This intermediary structure resolves the contradiction by providing both proximity and isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If cells are brought into direct contact to reduce area, then manufacturing cost per transistor decreases, but leakage current increases and battery life decreases

Engineering Contradiction:
Improvemanufacturing cost per transistorVSAvoidbattery life
Core Design Contradiction:
Ease of manufactureVSDuration of action of moving object

Solution Approach 1:

The patent applies different structural qualities to different locations: active areas are allowed to contact directly at cell boundaries for cost reduction, while trench isolation structures are locally inserted specifically where leakage would occur. This local differentiation enables direct contact where beneficial (for area and cost) while providing isolation where harmful (for leakage and power consumption).

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The active area is segmented into multiple separated regions by trench isolations, allowing direct cell contact overall while creating localized isolation barriers. This segmentation maintains the cost benefits of direct contact while preventing the harmful effects of uncontrolled leakage paths between adjacent cells.

Inventive Principle:
Principle #1Segmentation

3Area of stationary object

If gate electrode separation distance is reduced to increase density, then area decreases, but cross-talk increases and reliability decreases

Engineering Contradiction:
Improvecell areaVSAvoidsignal integrity
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The trench isolation structure serves as an intermediary barrier between adjacent active areas, reducing electromagnetic coupling and cross-talk between closely spaced gate electrodes. This mediating structure enables reduced gate separation for area reduction while maintaining signal integrity by blocking interference paths.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The continuous active area is segmented into isolated regions, which electrically separates adjacent transistor gates and reduces cross-talk. This segmentation allows tighter spacing for area reduction while maintaining reliability through electrical isolation of signal paths.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11935888B2Integrated circuit having fins crossing cell boundary
Publication Date: 2024.03.19 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11935888B2 patent drawing
  • US11935888B2 patent drawing
  • US11935888B2 patent drawing

AI summary

A method of making an integrated circuit includes steps of selecting a first cell and a second cell for an integrated circuit layout from a cell library in an electronic design automation (EDA) system, the first and second cells each having a cell active area, a cell gate electrode, at least one fin of a first set of fins, and a cell border region, each cell also having the active area at an exposed side, and placing the first exposed side against the second exposed side at a cell border. The method also includes operations of aligning at least one fin of the first set of fins with at least one fin of the second set of fins across a cell border.