Fin-Based Qubit Array Layout for Dense CMOS-Integrated Quantum Chips

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Solution Overview

Problem

Existing quantum computing technologies face challenges in achieving high qubit density and integrating quantum computing arrays with complementary metal-oxide semiconductor (CMOS) integrated circuits, limiting performance and scalability.

Innovation Solution

A quantum computing semiconductor device is designed with a two-dimensional array of qubits formed using fin-based semiconductor manufacturing techniques, where qubits are arranged at intersection points of fin structures, and controlled by barrier and accumulation gates, enabling efficient electron trapping and manipulation for quantum computing operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If qubits are arranged in a linear array, then the device structure is simple, but the qubit density is low and inter-qubit distances are large

Engineering Contradiction:
Improvequbit densityVSAvoiddevice structure
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent transitions from a one-dimensional linear array to a two-dimensional grid arrangement of qubits. The qubits are positioned at intersections of fin structures in a semiconductor substrate, creating a grid pattern that increases qubit density while maintaining manageable structural complexity through standardized fabrication processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent integrates multiple functional layers within the semiconductor structure, including fin structures, barrier gates, accumulation gates, and readout circuits nested within the same substrate. This nested arrangement allows high qubit density without proportionally increasing the device footprint or external complexity.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If qubit density is increased, then quantum computing performance improves, but integration with CMOS circuits becomes more difficult

Engineering Contradiction:
Improvequantum computing performanceVSAvoidintegration with CMOS circuits
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent uses uniform fin structures and standardized gate configurations throughout the quantum computing array, allowing the same fabrication processes to be applied across the entire device. This homogeneity enables scaling to higher qubit densities while maintaining compatibility with existing CMOS manufacturing techniques.

Inventive Principle:
Principle #33Homogeneity

Solution Approach 2:

The semiconductor substrate serves multiple functions: it provides the physical platform for qubit formation, contains the fin structures for electron confinement, houses the barrier and accumulation gates for quantum state control, and integrates readout circuits. This multi-functionality reduces the need for separate components and simplifies integration with CMOS technology.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If inter-qubit distances are reduced, then quantum entanglement efficiency improves, but manufacturing precision requirements increase

Engineering Contradiction:
Improvequantum entanglement efficiencyVSAvoidqubit positioning precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent employs self-aligned fabrication processes where subsequent structures are automatically positioned relative to previous layers without requiring additional alignment steps. The fin structures, barrier gates, and accumulation gates are formed using sequential deposition and etching processes that inherently maintain precise relative positioning, reducing inter-qubit distance variations.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces mechanical positioning methods with field-based control mechanisms. Quantum states are manipulated through electric fields from gates rather than physical manipulation, and qubit positions are defined by electromagnetic confinement rather than mechanical placement. This substitution reduces sensitivity to manufacturing tolerances while maintaining tight inter-qubit spacing.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The two-dimensional array design enhances qubit density and reduces inter-qubit distances, improving quantum computing performance and allowing integration with CMOS circuits, thereby enhancing computational capabilities.

Implementation Method 1

Quantum computing involves computation systems that use quantum mechanical phenomena to manipulate data

Methodology Applied
Scientific EffectQuantum mechanical phenomena:

Implementation Method 2

creating controlled entanglements among the N qubits

Methodology Applied
Scientific EffectQuantum entanglement:

Implementation Method 3

the spin of the electron may be modified through spin polarization

Methodology Applied
Scientific EffectSpin polarization:

Data Source

PatentUS20250366079A1Quantum computing semiconductor device and methods of formation
Publication Date: 2025.11.27 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250366079A1 patent drawing
  • US20250366079A1 patent drawing
  • US20250366079A1 patent drawing

AI summary

Qubits in a quantum computing semiconductor device may be arranged in a two-dimensional array. The two-dimensional array may be implemented using fin-based semiconductor manufacturing techniques. For example, a first active semiconductor region (e.g., a first fin structure) may extend in a first direction and a second active semiconductor region (e.g., a second fin structure) may extend in a second direction. A qubit may be located an intersection point between the first active semiconductor region and the second semiconductor region. This enables qubits to be formed in a grid in the two-dimensional array, which provides greater qubit density and shorter distances between qubits (and thus, greater quantum computing performance) compared to one-dimensional (e.g., linear) qubit arrays. Moreover, implementing qubits using fin-based semiconductor manufacturing techniques enables quantum computing arrays to be integrated on the same semiconductor device as other complementary metal-oxide semiconductor (CMOS) integrated circuits.