Fine Concave-Convex Pattern Transfer Using Heated Release Sheet

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Solution Overview

Problem

Existing methods for manufacturing fine concave-convex patterns on substrates face challenges in forming patterns without damaging the substrate, especially when the substrate has uneven surfaces, as they often require thick adhesive layers that hinder high-contrast pattern transfer and are prone to deformation and dust-related defects.

Innovation Solution

A method involving a sheet-like member with a concave-convex pattern block and a reverse concave-convex pattern layer, where the sheet is heated to soften, compressively bonded to the substrate, and then removed, transferring the pattern while minimizing substrate damage and allowing for high-contrast pattern formation even on uneven surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a thick adhesive layer is used to bond the pattern layer to the substrate, then the bonding strength is improved, but the pattern transfer contrast deteriorates and the risk of deformation and dust defects increases

Engineering Contradiction:
Improvebonding strengthVSAvoidpattern transfer contrast
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The patent introduces a release layer as an intermediary between the pattern layer and the substrate. This release layer enables the pattern layer to be transferred to the substrate without requiring a thick adhesive layer, thus maintaining high pattern transfer contrast while achieving sufficient bonding strength through controlled adhesion during the transfer process

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the adhesion parameters by using a release layer with specific adhesion characteristics that allow the pattern layer to adhere strongly during transfer but release easily afterward. This parameter change enables thin adhesive layers to achieve the necessary bonding strength without compromising pattern transfer quality

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If conventional lithography methods are used on uneven substrates, then the manufacturing process is simplified, but the pattern formation quality deteriorates due to substrate deformation and dust defects

Engineering Contradiction:
Improveprocess simplicityVSAvoidpattern formation quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent performs preliminary actions by preparing a release layer and a pattern layer with specific adhesion properties before the actual pattern transfer. This preliminary preparation ensures that the pattern can be transferred accurately to uneven substrates without causing deformation or dust defects, while maintaining process simplicity

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses a pattern layer that serves as a copy or template for the desired concave-convex pattern. This pattern layer is transferred to the substrate through a controlled process that maintains pattern integrity even on uneven surfaces, achieving high manufacturing precision without complicating the manufacturing process

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the formation of fine concave-convex patterns on substrates with reduced risk of deformation and dust-related defects, improving adaptability to substrate unevenness and maintaining pattern integrity, thus enhancing the yield and quality of devices like LEDs.

Implementation Method 1

heating a sheet-like member

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

The sheet-like member has a concave-convex pattern block on at least one of surfaces of the sheet-like member, and is given flowability to the sheet-like member by heating

Methodology Applied
Scientific EffectThermoplastic softening: Melting

Implementation Method 3

compressively bonding the sheet-like member

Methodology Applied
Scientific EffectCompressive bonding: Compression

Data Source

PatentUS9114592B2Method for manufacturing fine concave-convex pattern and sheet for manufacturing fine concave-convex pattern
Publication Date: 2015.08.25 KK TOSHIBA
  • US9114592B2 patent drawing
  • US9114592B2 patent drawing
  • US9114592B2 patent drawing

AI summary

According to a first aspect of the invention, a method for manufacturing a concave-convex pattern includes the steps of heating a sheet-like member, compressively bonding the sheet-like member, removing the sheet-like member after the compressively bonding, and transferring a pattern shape of a reverse concave-convex pattern layer to a surface of the substrate. The sheet-like member has a concave-convex pattern block on at least one of surfaces thereof, and is given flowability thereto by heating. The reverse concave-convex pattern layer is formed on the one of the surfaces, and continues over two or more concaves of the concave-convex pattern block so that the reverse concave-convex pattern layer meshes at least partially with the concave-convex pattern block. At least the reverse concave-convex pattern layer is left on the substrate. Here, the one of the surfaces has the concave-convex pattern block.