Fine-Grain Metal Plate for Thin Vapor Deposition Masks
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Solution Overview
Problem
Existing deposition masks with small thicknesses suffer from reduced strength, leading to plastic deformation during manufacturing or usage.
Innovation Solution
A metal plate for manufacturing deposition masks, made of rolled steel or plating film with an iron alloy containing nickel and cobalt, having a thickness of 30 μm or less, and an average cross-sectional area of crystal grains ranging from 0.5 μm² to 50 μm², calculated using the EBSD method.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the thickness of the metal plate is reduced to achieve high pixel density deposition masks, then the deposition precision and pattern fineness are improved, but the strength and resistance to plastic deformation deteriorate
Solution Approach 1:
The patent applies parameter changes by precisely controlling the crystal grain cross-sectional area (0.5-50 μm²) and nickel content (6-38 mass%) to achieve optimal balance between strength and thinness. This quantitative parameter optimization allows the metal plate to maintain sufficient strength at reduced thickness while enabling high-precision deposition patterns.
Solution Approach 2:
The patent creates a composite microstructure by controlling crystal grain size and distribution within the metal plate. This composite approach, combined with specific nickel alloying, produces a material with enhanced strength-to-thickness ratio, allowing thin plates to resist deformation during manufacturing and usage.
2Ease of manufacture
If the thickness of the metal plate is reduced to enable flexible deposition mask manufacturing, then the ease of manufacture and adaptability are improved, but the reliability and resistance to deformation during usage worsen
Solution Approach 1:
The patent optimizes manufacturing parameters including crystal grain area (0.5-50 μm²) and nickel content (6-38 mass%) to achieve reliable thin metal plates. These controlled parameters ensure that even at thicknesses suitable for flexible manufacturing, the plates maintain sufficient reliability and deformation resistance during actual usage.
3Strength
If the nickel content in the iron alloy is increased to enhance strength, then the strength and weldability are improved, but the manufacturing cost and material complexity increase
Solution Approach 1:
The patent identifies an optimal nickel content range (6-38 mass%) that provides sufficient strength and weldability without excessive complexity. This parameter optimization allows achieving desired mechanical properties with moderate alloying rather than complex multi-element compositions.
Solution Approach 2:
The patent applies local quality by controlling nickel distribution and crystal grain structure to achieve uniform strength properties throughout the metal plate. This localized control of material properties ensures consistent performance without requiring overall compositional complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the strength and weldability of the metal plate, reducing the likelihood of deformation during deposition mask manufacturing and usage.
Implementation Method 1
an average cross-sectional area of crystal grains on a cross section of the metal plate is from 0.5 μm² to 50 μm²
Implementation Method 2
the strength of a metal plate constituting the deposition mask decreases, plastic deformation is likely to occur on the metal plate
Data Source
AI summary
A metal plate used for manufacturing a deposition mask has a thickness of equal to or less than 30 μm. An average cross-sectional area of the crystals grains on a cross section of the metal plate is from 0.5 μm2 to 50 μm2. The average cross-sectional area of crystal grains is calculated by analyzing measurement results obtained by an EBSD method, the measuring results being analyzed by an area method under conditions where a portion with a difference in crystal orientation of 5 degrees or more is recognized as a crystal grain boundary.