Fine Metal Mask Manufacturing via Laser and Etching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional methods for manufacturing fine metal masks (FMM) for organic light-emitting display apparatuses result in relatively low pattern resolutions and deformation issues during the manufacturing process.
Innovation Solution
A method involving the formation of a mask with first and second protection layers, where a laser beam creates blind holes in the mask member, and an etchant extends these holes through the mask member, allowing for varying hole widths from the top to the bottom surface, reducing thermal deformation and enabling high-resolution patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional methods are used to manufacture fine metal masks, then the manufacturing process is simple, but the pattern resolution is low and deformation occurs
Solution Approach 1:
The manufacturing process is divided into multiple sequential steps: forming protection layers, creating blind holes via laser, extending to through-holes via etching, and selective removal. This segmentation allows each step to be optimized independently, achieving high pattern resolution while managing overall process complexity.
Solution Approach 2:
Protection layers are formed in advance before the main hole-forming process. This preliminary action protects the mask member during subsequent laser and etching operations, preventing deformation and enabling higher precision patterning that would not be possible with conventional direct methods.
2Manufacturing precision
If laser beams are used to create blind holes, then high-resolution patterns are achieved, but thermal deformation may occur
Solution Approach 1:
Protection layers are formed before laser processing to isolate and contain the thermal effects within the localized hole regions. This preliminary protective measure prevents heat diffusion to surrounding areas, maintaining high precision while minimizing thermal deformation of the overall mask structure.
Solution Approach 2:
The protection layers act as intermediaries between the laser beam and the mask member bulk material. They allow the laser to create precise blind holes while the layered structure manages heat distribution, preventing excessive thermal deformation that would compromise pattern resolution.
3Ease of manufacture
If through-holes are formed directly without blind holes, then the manufacturing process is simpler, but pattern resolution and deformation control are poorer
Solution Approach 1:
The hole formation process is segmented into two distinct phases: first creating blind holes with laser for high precision, then extending to through-holes with etching. This segmentation achieves superior pattern resolution compared to direct through-hole formation, while the systematic approach manages the increased process complexity.
Solution Approach 2:
The process replaces direct mechanical or chemical through-hole formation with a two-stage approach using laser (optical energy) for initial hole creation, followed by controlled chemical etching. This substitution enables higher precision patterning that cannot be achieved with conventional single-step methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the creation of masks with high-resolution patterns and reduced deformation, enabling finer pixel intervals in display apparatuses by controlling the hole sizes and shapes through the mask manufacturing process.
Implementation Method 1
radiating, through the first through-holes, a laser beam onto the exposed portions of the first surface to form blind holes in the mask member
Implementation Method 2
providing an etchant to form second through-holes in the mask member, the second through-holes comprising the blind bores and extending from the first surface to a second surface of the mask member
Data Source
AI summary
A method of manufacturing a mask includes forming a first protection layer on a first surface of a mask member, the first protection layer comprising first through-holes exposing portions of the first surface; radiating, through the first through-holes, a laser beam onto the exposed portions of the first surface to form blind holes in the mask member; and providing an etchant to form second through-holes in the mask member, the second through-holes comprising the blind bores and extending from the first surface to a second surface of the mask member opposing the first surface.