Fine Pitch Device Alignment via Vacuum Base Plate Vision
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Solution Overview
Problem
Conventional alignment devices for fine-pitch semiconductor devices require high precision alignment, but are inefficient due to the need for repeated carrier connections and disconnections, leading to potential device damage and reduced test efficiency.
Innovation Solution
An apparatus and method that uses a base plate with vacuum suction to align devices in X-Y-θ directions, utilizing a vision system to recognize device coordinates and adjust the alignment block for precise positioning, allowing multiple devices to be tested simultaneously without separate carriers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If devices are individually transferred using carrier and socket guide with repeated connection and disconnection, then electrical testing can be performed, but alignment precision deteriorates due to margin increase from repeated operations
Solution Approach 1:
The patent merges the carrier and socket guide into a single integrated base plate structure. Multiple devices are simultaneously held and aligned on the base plate using vacuum suction, eliminating the need for repeated connection and disconnection operations between separate carrier and socket guide components. This integration maintains alignment precision while enabling parallel testing of multiple devices.
Solution Approach 2:
The patent replaces the mechanical connection and disconnection system of carrier and socket guide with a vacuum suction system. The base plate uses vacuum holes to hold devices in position without mechanical engagement, eliminating wear and margin increase from repeated mechanical operations while maintaining precise alignment.
2Extent of automation
If alignment holes and alignment pins are used for mutual alignment, then ball terminals and probe pins can be aligned, but device complexity increases and automation is reduced
Solution Approach 1:
The patent implements self-service alignment through vision recognition. A vision recognition unit automatically detects the positions of devices on the base plate and provides feedback to a controller, which then adjusts the base plate position accordingly. This eliminates the need for complex mechanical alignment holes and pins, enabling fully automatic alignment with reduced structural complexity.
Solution Approach 2:
The patent introduces a feedback mechanism where the vision recognition unit continuously monitors device positions and communicates with the controller to make real-time position adjustments. This closed-loop feedback system enables precise automatic alignment without requiring complex pre-configured mechanical alignment features.
3Productivity
If devices are tested individually in sequence, then each device can be properly aligned and tested, but loss of time increases due to sequential processing
Solution Approach 1:
The patent segments the testing process by enabling simultaneous testing of multiple devices that are held on the base plate. Each device can be independently tested through its own contactless interface while other devices are being tested or positioned, allowing parallel processing and significantly reducing total testing time compared to sequential individual testing.
Solution Approach 2:
The patent enables continuous useful action by maintaining all devices in a ready-to-test state on the base plate simultaneously. The vacuum suction system holds multiple devices in position continuously, and the testing process can proceed without interruption or repeated setup operations, maximizing productivity and minimizing loss of time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances alignment precision, reduces equipment damage, and increases test efficiency by preventing mismatching and offset between ball terminals and probe pins, while maintaining equipment operation at optimal levels.
Implementation Method 1
a base plate installed on the upper surface of the Y-axis plate and having vacuum holes respectively formed at seating points of devices so that as vacuum pressure is applied while a device is loaded, the base plate suctions the loaded device with the vacuum pressure that allows minute movement of the loaded device
Data Source
AI summary
A method for aligning a device includes: loading devices sequentially on an upper surface of a base plate having vacuum holes; suctioning the loaded device with vacuum pressure that allows minute movement of the loaded device, as the vacuum pressure is applied while the device is loaded on the base plate; moving an alignment vision assembly positioned above the base plate to the upper portion of the device to be aligned and then lowering the alignment vision assembly; checking a position of the device with a vision means through a through hole and an opening in a state, in which an alignment block surrounds the device, so as to inform a controller of the coordinates of the device; and aligning the device by finely moving the base plate in X-Y-θ directions according to the coordinates so that the device is guided to two surfaces of the opening.