FinFET Standard Cell Design Using Local Layout Effects

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The design of FinFET-based standard cells is constrained by high gate capacitance, discrete fin options, and layout-dependent effects, leading to increased complexity and sub-optimal performance, particularly in achieving balanced beta ratios and reducing power consumption.

Innovation Solution

The method involves removing fingers from PFETs in a standard FinFET cell layout, introducing a Half-Double Diffusion Break on the NFET side using a cut-poly layer to isolate PFET and NFET gates, and converting removed PFET fingers into floating gates by shorting their terminals to a common power net, thereby creating a hybrid structure that exploits local layout effects for improved performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If FinFET structure is used to reduce area occupancy, then area efficiency is improved, but gate capacitance increases leading to higher delay and power consumption

Engineering Contradiction:
Improvearea occupancyVSAvoidpower consumption
Core Design Contradiction:
Area of stationary objectVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by introducing diffusion breaks at specific locations within the FinFET structure. These diffusion breaks are placed strategically to reduce parasitic capacitance at critical interfaces, thereby lowering overall power consumption while maintaining the area-efficient FinFET configuration.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If discrete fin options are used for device width selection, then manufacturing simplicity is improved, but design flexibility is reduced making it difficult to achieve optimal beta ratios

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddesign flexibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent segments the device width into two independent controllable parameters: number of fins and channel width. This segmentation allows designers to independently optimize each parameter to achieve desired beta ratios while maintaining manufacturing simplicity through standardized fin structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent enables continuous adjustment of device width by varying the channel width parameter independently from the fin count. This parameter change approach provides design flexibility to achieve optimal beta ratios without compromising manufacturing simplicity.

Inventive Principle:
Principle #35Parameter changes

3Power

If multiple fins are added to increase drive current, then current driving capability is improved, but input capacitance increases leading to higher dynamic power consumption

Engineering Contradiction:
Improvedrive currentVSAvoiddynamic power consumption
Core Design Contradiction:
PowerVSUse of energy by moving object

Solution Approach 1:

The patent changes the channel width parameter to increase drive current instead of simply adding more fins. This parameter change allows achieving higher drive current while controlling input capacitance, thereby reducing dynamic power consumption.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent applies local quality by introducing diffusion breaks at specific locations to reduce parasitic capacitance. This local modification reduces the capacitive loading associated with multiple fins, thereby lowering dynamic power consumption while maintaining high drive current capability.

Inventive Principle:
Principle #3Local quality

4Ease of manufacture

If standard FinFET layout is used, then manufacturing process is simplified, but layout dependent effects increase causing design complexity

Engineering Contradiction:
Improveprocess simplicityVSAvoidlayout complexity
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent applies local quality by introducing diffusion breaks at specific strategic locations within the standard FinFET layout. These localized modifications address layout dependent effects without disrupting the overall simplified manufacturing process, thereby reducing design complexity while maintaining process simplicity.

Inventive Principle:
Principle #3Local quality

Data Source

PatentUS11271011B2Method for high performance standard cell design techniques in FinFET based library using local layout effects (LLE)
Publication Date: 2022.03.08 SAMSUNG ELECTRONICS CO LTD
  • US11271011B2 patent drawing
  • US11271011B2 patent drawing
  • US11271011B2 patent drawing

AI summary

Inventive concepts describe a method for high performance standard cell design techniques in FinFET based library using LLE. Inventive concepts describe a fabrication process using a standard FinFET cell layout having double diffusion breaks (DDBs) and single diffusion breaks (SDBs). According to one example embodiment, the method comprises of removing one or more fingers of a P-type FinFet (PFET) from a standard FinFET cell layout. After removing the one or more fingers, a Half-Double Diffusion Break (Half-DDB) is introduced on a N-type FinFET (NFET) side inside a cell boundary using a cut-poly layer. The cut-poly layer not only isolates the PFET and NFET gates and also becomes an integral part of hybrid structure. Further, the removed one or more fingers of PFET gates are converted to two floating PFET gates by shorting a drain terminal and a source terminal of the PFET gate to a common power net.