FinFET Transistor Fin Height Optimization for SEU Mitigation

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Solution Overview

Problem

FinFET transistors in front end circuits, such as SRAM structures, are susceptible to single event upsets (SEU) due to high energy particle strikes, leading to increased Soft Error Rate (SER), which is challenging to address without increasing die area and cost.

Innovation Solution

Increasing the fin height of FinFET transistors beyond the optimal height for optimal speed reduces the recovery time and enhances the restoring current, thereby decreasing the SEU error rate with negligible impact on die area, making the transistors more resistant to high energy particle strikes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the fin height of FinFET transistors is increased beyond the optimal height, then the SEU error rate is reduced and reliability is improved, but the transistor speed deteriorates

Engineering Contradiction:
ImproveSEU error rateVSAvoidtransistor speed
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The patent applies parameter changes by intentionally increasing the fin height parameter beyond its optimal value for speed. This parameter modification (height > HOPT) transforms the transistor's electrical characteristics to enhance restoring current and reduce SEU susceptibility, accepting a trade-off in speed performance. The specific parameter change is the fin height dimension, which is deliberately oversized to improve reliability metrics.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the fin height of FinFET transistors is increased to reduce SEU error rate, then the recovering time is reduced, but the die area increases

Engineering Contradiction:
ImproveSEU error rateVSAvoiddie area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent modifies the fin height parameter to achieve SEU mitigation while controlling die area impact. By optimizing the extent of height increase beyond HOPT, the design balances reliability improvement against area overhead. The parameter change approach allows quantitative control over the trade-off between SEU error rate reduction and die area increase.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10366999B2Single event upset (SEU) mitigation for FinFET technology using fin topology
Publication Date: 2019.07.30 XILINX INC
  • US10366999B2 patent drawing
  • US10366999B2 patent drawing

AI summary

Front end circuits that include a FinFET transistor are described herein. In one example, the front end circuit has a FinFET transistor that includes a channel region wrapped by a metal gate, the channel region connecting a source and drain fins. At least one of the source and drain fins have a height (HTOT) and a width W. The height (HTOT) is greater than an optimal height (HOPT), wherein the height HOPT is a height that would optimize speed of a FinFET transistor having the width W.