Five-Rib Metal Mirror Member for Accurate Dual-Axis Scanning

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Solution Overview

Problem

Scanner devices with oscillatable mirrors, traditionally manufactured from semiconductor wafers, face challenges in ensuring drive accuracy, durability, and reliability due to multiple support parts, and incur high manufacturing costs.

Innovation Solution

A mirror member design featuring a main frame, mirror, and support parts with specific rib configurations that connect the inner edge of the frame to the mirror, including radial and circumferential ribs, with bent-back portions to enhance stability and linearity, using metal materials for improved manufacturability and reduced fragility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a semiconductor wafer is used to form the mirror member, then manufacturing precision can be improved, but manufacturing cost increases and ease of manufacture deteriorates

Engineering Contradiction:
Improvemanufacturing precisionVSAvoidease of manufacture
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The invention changes the material parameter from semiconductor wafer to metal plate, and changes the support structure parameter from three or more support parts to a specific five-rib configuration. This allows achieving both high manufacturing precision through metal's inherent stability and ease of manufacture through conventional metal processing techniques

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses a composite structure combining a metal plate with a specifically designed support rib system. The metal plate provides a stable base while the five-rib support structure (comprising first through fifth support ribs) provides precise positioning and dual-axis oscillation capability, achieving both precision and manufacturability

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If three or more support parts are provided to enable dual-axis operation, then adaptability is improved, but reliability deteriorates due to difficulty in ensuring drive accuracy and durability

Engineering Contradiction:
Improvedual-axis operation capabilityVSAvoiddrive accuracy and durability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The support structure is segmented into five distinct support ribs with specific functions: first and fifth ribs provide radial support for primary oscillation, while second, third, and fourth ribs provide circumferential support for secondary oscillation. This segmentation allows each rib to be optimized for its specific function, improving overall reliability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The support rib structure is designed to enable dynamic dual-axis oscillation of the mirror. The flexible connection between the five support ribs allows the mirror to oscillate freely in both the primary oscillation direction and secondary oscillation direction, achieving adaptability while maintaining reliability through the balanced support configuration

Inventive Principle:
Principle #15Dynamics

3Adaptability or versatility

If multiple support parts are used, then adaptability is improved, but device complexity increases making it difficult to ensure reliability

Engineering Contradiction:
Improvedual-axis operation capabilityVSAvoidsupport structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention merges multiple support functions into a unified five-rib support structure integrated with the metal plate. Instead of separate support parts, the first through fifth support ribs are directly formed as integral parts of the metal plate structure, reducing assembly complexity while maintaining dual-axis operation capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The five-rib support structure serves multiple functions simultaneously: it provides radial support for primary oscillation, circumferential support for secondary oscillation, structural stability, and precise positioning. This multi-functionality reduces the need for additional specialized components, simplifying the overall device structure

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20250306337A1Mirror member
Publication Date: 2025.10.02 TOPCON CORPORATION
  • US20250306337A1 patent drawing
  • US20250306337A1 patent drawing
  • US20250306337A1 patent drawing

AI summary

A support part in a mirror member includes a first support rib connected to the mirror and extending in a radial direction from a rotation center of the mirror to the inner edge; a second support rib connected to the first support rib and extending in a first circumferential direction about the rotation center; a third support rib connected to the second support rib and extending in a second circumferential direction, opposite to the first circumferential direction, on the outer diameter side of the rotation center with respect to the second support rib; a fourth support rib connected to the third support rib and extending in the first circumferential direction outward of the rotation center with respect to the third support rib; and a fifth support rib extending in the radial direction from the fourth support rib and connecting to both the fourth support rib and the inner edge.