Five-Wire Wide-Range Oxygen Sensor Chip With Double-Side Diffusion Barriers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing manufacturing process of wide-area five-wire oxygen sensors faces issues with inaccurate punching depth and precision, air intake resistance changes affecting response speed and stability, and hole blockage leading to performance degradation.
Innovation Solution
A novel air intake method using double-side pump electrode diffusion barriers and a tetracobalt trioxide ultra-thin nanostructure on the zirconia substrate, combined with a four-layer base structure and specific manufacturing steps to ensure consistent performance and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If small hole air intake mode is used, then air can enter the pump electrode diffusion barrier, but punching depth and precision cannot be controlled accurately
Solution Approach 1:
The patent replaces the mechanical punching method with a chemical etching process. Instead of using physical punches to create air intake holes, the invention uses chemical etching to form through-holes in the pump electrode diffusion barrier, thereby eliminating the precision and depth control issues associated with mechanical punching while maintaining ease of manufacture.
Solution Approach 2:
The patent changes the manufacturing parameter from mechanical dimensions (punching depth, hole diameter) to chemical process parameters (etching time, etchant concentration). This parameter transformation allows for more precise and controllable air intake hole formation, resolving the contradiction between ease of manufacture and manufacturing precision.
2Device complexity
If small hole air intake mode is used, then air intake structure is simple, but air intake resistance changes affecting response speed and stability
Solution Approach 1:
The patent transforms the solid pump electrode diffusion barrier into a porous structure with controlled porosity (30-70%). This porous structure provides multiple air intake pathways simultaneously, reducing air intake resistance and improving response speed and stability while maintaining structural simplicity. The porous architecture allows air to flow through numerous interconnected channels rather than a single small hole.
Solution Approach 2:
The patent segments the single air intake pathway into multiple parallel channels within the porous structure. By dividing the air intake function across numerous small pores distributed throughout the diffusion barrier, the system reduces resistance and improves reliability without increasing overall structural complexity.
3Ease of manufacture
If small hole air intake mode is used, then manufacturing process is simple, but holes are easily blocked by particulate matter
Solution Approach 1:
The patent employs a porous diffusion barrier structure with controlled pore sizes and distributions. This porous architecture provides redundant air intake pathways, so if some pores become blocked by particulate matter, air can still flow through other open pores, thereby maintaining reliability while keeping the manufacturing process simple.
Solution Approach 2:
The patent performs preliminary chemical etching to create the porous structure before final assembly and testing. This preliminary action ensures that the air intake pathways are established and optimized before the sensor encounters operational particulate matter, preventing blockage issues from the outset.
4Volume of moving object
If small hole air intake mode is used, then structure is compact, but harmful substances pollute the holes affecting accuracy
Solution Approach 1:
The patent uses a porous diffusion barrier that maintains compact overall dimensions while providing extensive internal surface area for air intake. The porous structure's high surface-area-to-volume ratio allows efficient oxygen detection while the distributed pore network reduces the impact of localized pollution from harmful substances.
Solution Approach 2:
The patent segments the air intake function across numerous distributed pores rather than concentrating it in a single hole. This segmentation means that harmful substances can only block a small fraction of the total air intake pathways, preserving measurement accuracy while maintaining compact sensor design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The new design stabilizes sensor response and prevents deformation, enhances detection sensitivity, and improves accuracy in oxygen concentration measurement.
Implementation Method 1
The pump electrode diffusion barrier is printed in the third base layer to control and adjust diffusion of oxygen in the pump oxygen chamber
Implementation Method 2
a reference electrode disposed below the third base layer and configured to receive electrons in oxygen and interact with an electrolyte between the outer electrode and the reference electrode to form a current
Implementation Method 3
a layer of tetracobalt trioxide ultra-thin nanostructure is disposed on the base layer... the addition of the ultrathin tetracobalt trioxide nano film can enable a zirconia film to obtain better electrocatalytic activity and realize faster electron transfer power
Implementation Method 4
a heater layer disposed between the first base layer and the second base layer
Data Source
AI summary
Disclosed are an intelligent wide-range five-wire oxygen sensor chip and a manufacturing method thereof. The chip includes a substrate layer, an outer electrode, a reference electrode, a pump electrode, a pump electrode diffusion barrier and a heater layer, the pump electrode diffusion barrier is printed in a third substrate layer, diffusion of oxygen in an oxygen pumping cavity is controlled and adjusted, a double-side air inlet mode is adopted to replace top small holes and porous air inlet.