Fixed Heater Block in Angle Valve for Semiconductor Manufacturing
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Solution Overview
Problem
Existing angle valves in semiconductor manufacturing suffer from reduced lifespan and inefficient heat transfer due to the displacement and damage of coil-shaped sheath heaters and thermocouples, as well as inefficient heat distribution, leading to particle precipitation and increased maintenance needs.
Innovation Solution
A fixed heater block is integrated into the angle valve, securely seated within the bellows, allowing for uniform heat conduction and radiation, and connected to a heat transfer block that maintains its position during operation, preventing damage and enhancing thermal efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a coil-shaped sheath heater is used to heat the valve body and bellows, then particle precipitation is prevented, but the heater and thermocouple experience contraction and relaxation due to actuator operation, leading to displacement and damage
Solution Approach 1:
The heater is divided into multiple independent heating elements (first heating element and second heating element) that are positioned at different locations. This segmentation allows each element to function independently and reduces the impact of mechanical stress on any single element, preventing displacement and damage while maintaining effective heating to prevent particle precipitation.
Solution Approach 2:
Instead of allowing the heater to move with the actuator (as in the conventional coil-shaped sheath heater), the heating elements are positioned to remain stationary relative to the valve body. The bellows expands and contracts around these fixed heating elements, inverting the conventional approach where the heater moves with the actuator. This prevents displacement and damage to the heater and thermocouple while still achieving effective heating.
2Temperature
If a coil-shaped sheath heater is used, then heating function is provided, but heat transfer efficiency is reduced due to relaxed structure and poor thermal conduction
Solution Approach 1:
The heating elements are positioned to make direct contact with or be in close proximity to critical areas that require heating (valve body and bellows). This localized positioning ensures that heat is transferred efficiently to the areas that need it most, improving overall heat transfer efficiency while maintaining effective heating capability throughout the valve assembly.
Solution Approach 2:
The conventional coil-shaped sheath heater structure is replaced with solid heating elements that provide more direct and efficient thermal conduction. This substitution improves heat transfer efficiency by eliminating the indirect heating path through the bellows wall that characterizes coil-shaped heaters, while still achieving the required heating capability.
3Ease of operation
If the bellows expands and contracts during valve operation, then the valve can open and close, but the coil-shaped heater and thermocouple experience mechanical stress leading to displacement and damage
Solution Approach 1:
Instead of the heater and thermocouple moving with the bellows during expansion and contraction, the heating elements are positioned to remain stationary while the bellows moves around them. This inversion of the conventional approach allows the valve to open and close smoothly while the heating elements remain stable and undisturbed, preventing displacement and damage.
Solution Approach 2:
The bellows acts as an intermediary that separates the moving valve mechanism from the stationary heating elements. This intermediary arrangement allows the bellows to expand and contract for valve operation while the heating elements remain fixed, preventing mechanical stress and displacement. The thermocouple is similarly protected by this intermediary arrangement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fixed heater block improves the lifespan and efficiency of the angle valve, reduces component replacement, and ensures uniform thermal conduction and radiation, preventing particle precipitation and maintaining the integrity of connected wires and components.
Implementation Method 1
a heater radiating heat that is greater than a predetermined temperature is attached in the angle valve to increase an inner temperature of the angle valve, thereby preventing the precipitation phenomenon of the particles
Implementation Method 2
as the fixed heater block is fixed in a bellows to maintain a fixed state of the fixed heater block although the driving member operates, the angle valve may improve a lifespan and efficiency of the fixed heater block
Implementation Method 3
as the fixed heater block is fixed in a bellows to maintain a fixed state of the fixed heater block although the driving member operates, the angle valve may improve a lifespan and efficiency of the fixed heater block and reduce the number of replacement of a component
Data Source
AI summary
Provided is an angle valve including a fixed heater block. The angle valve includes a valve casing 100 having a fluid flow hole 101 defined therein and having an inlet 110 through which fluid is introduced and an outlet 120 through which the fluid is discharged, a fixed heater block 200 fixedly installed in the valve casing 100 and having a slide hole 210 defined therein, a driving member 300 detachably coupled to an upper portion of the valve casing 100 to provide a driving force, and a sealing unit 400 connected to the driving member 300 to open and close the inlet 110 according to whether the driving member 300 is driven.