Flammable Gas Diluter With Dual Airflow and Damper Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing semiconductor fabrication processes that utilize flammable gases like hydrogen face challenges in safely disposing of these gases, as burning them is environmentally costly and requires redundant systems, while dilution with inert gases is expensive and inefficient.
Innovation Solution
A flammable gas diluter system with two air flow generators, each operating in operational and backup modes, controlled by dampers and circuitry to ensure safe dilution below the flammability limit, using air at high velocity to prevent ignition, and incorporating design features for efficient mixing and compactness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If flammable gas is burned in a burner for abatement, then the gas is removed from the system, but environmental costs increase and fuel consumption increases
Solution Approach 1:
The invention changes the concentration parameter of the flammable gas by diluting it with air from the surrounding environment. By introducing ambient air into the system, the flammable gas concentration is reduced from potentially explosive levels to below the lower flammability limit, allowing safe atmospheric discharge without requiring combustion or additional fuel input.
2Object-generated harmful factors
If flammable gas is burned in a burner for abatement, then the gas is removed from the system, but environmental impact increases
Solution Approach 1:
The invention changes the concentration parameter of the flammable gas by diluting it with air from the surrounding environment. By introducing ambient air into the system, the flammable gas concentration is reduced from potentially explosive levels to below the lower flammability limit, allowing safe atmospheric discharge without requiring combustion or additional fuel input.
Solution Approach 2:
The system utilizes ambient air from the surrounding environment as the dilution medium, eliminating the need for separate air supply systems or additional resources. The environment itself provides the necessary diluent, making the system self-sufficient and reducing overall resource consumption.
3Object-generated harmful factors
If nitrogen is used to dilute flammable gas, then the gas concentration is reduced below flammability limit, but cost increases
Solution Approach 1:
The system utilizes ambient air from the surrounding environment as the dilution medium, eliminating the need for separate air supply systems or additional resources. The environment itself provides the necessary diluent, making the system self-sufficient and reducing overall resource consumption.
Solution Approach 2:
The invention changes the concentration parameter of the flammable gas by diluting it with air from the surrounding environment. By introducing ambient air into the system, the flammable gas concentration is reduced from potentially explosive levels to below the lower flammability limit, allowing safe atmospheric discharge without requiring combustion or additional fuel input.
4Device complexity
If a single gas flow generator is used, then the system is simpler, but reliability decreases
Solution Approach 1:
The gas flow generation function is segmented into multiple independent units (first and second gas flow generators). Each generator can operate independently to provide dilution air, ensuring that if one unit fails, the other can maintain system operation. This segmentation of the air supply function enhances reliability without significantly increasing overall system complexity.
Solution Approach 2:
The dampers associated with each gas flow generator are configured with different operational characteristics - the first damper remains substantially closed during normal operation while the second damper is open, creating asymmetric local conditions that optimize reliability. This localized differentiation allows the system to maintain functionality even if one generator fails.
5Productivity
If the damper is kept open for gas flow, then gas dilution is effective, but flammable gas may leak through the system
Solution Approach 1:
The damper configuration is dynamically adjusted based on operational requirements. The first damper is configured to be substantially closed during normal operation to prevent leakage, while the second damper remains open to allow effective gas dilution. This dynamic positioning of dampers allows the system to simultaneously prevent flammable gas leakage and maintain dilution efficiency.
Solution Approach 2:
The dampers act as intermediary control elements between the gas flow generators and the mixing chamber. By strategically positioning and configuring the dampers (first damper closed, second damper open), the system controls the flow paths to prevent flammable gas leakage while maintaining effective dilution through the second generator's air supply.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively and safely dilutes flammable gases to below the flammability limit, reducing environmental impact and operational costs, and ensures reliable operation with minimal system disruption.
Implementation Method 1
using air at high velocity to prevent ignition
Implementation Method 2
said dampers being configured to obscure a passage between said corresponding gas flow generator and said dilution vessel when closed and to open said passage between said gas flow generator and said dilution vessel when open
Implementation Method 3
A flammable gas diluter for diluting a flow of flammable gas to a concentration below the flammability limit
Data Source
AI summary
A flammable gas diluter includes a dilution vessel having an outer envelope defining a longitudinal flow passage from an inlet to an outlet; at least one air inlet assembly for directing a flow of air into the inlet of the dilution vessel; a flammable gas inlet arrangement located towards an inlet end of the dilution vessel; two gas flow generators configured to pump a flow of air into the air inlet assembly, the two gas flow generators being located upstream of the flammable gas inlet arrangement; and two dampers, each of the dampers being mounted between a corresponding gas flow generator and the dilution vessel. Control circuitry is configured to open a damper during an operational mode of the corresponding gas flow generator and to close the damper when the corresponding gas flow generator is stopped in standby mode.