Flash Lamp Thermal Processing Light Energy Measurement
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Solution Overview
Problem
In thermal processing of semiconductor substrates using flash lamps, it is challenging to accurately measure light energy and detect lamp deterioration due to short irradiation times and difficulties in measuring surface temperature in real-time, leading to potential processing failures.
Innovation Solution
A thermal processing apparatus with a light measuring part that includes a calorimeter and light guide structure to measure light energy entering the chamber and calculate surface temperature, using a light entrance portion on the substrate side and a calorimeter to convert light energy into electrical signals for precise energy density calculations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If flash lamps are used to heat the substrate in extremely short time, then heating speed is improved, but measurement precision of light energy deteriorates
Solution Approach 1:
The patent applies preliminary action by measuring the light energy from flash lamps before the extremely short irradiation time begins. The measuring part captures the light energy during the brief moment it enters the chamber, converting it to electrical signals before the flash completes. This allows accurate measurement of the heating energy without requiring measurement during or after the rapid heating process, thus resolving the contradiction between fast heating and precise measurement.
2Measurement precision
If light energy measurement is performed inside the chamber, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent uses an intermediary approach by introducing a measuring part that converts light energy to electrical signals within the chamber. This measuring part acts as an intermediary device that captures light energy without requiring complex external measurement systems. The conversion of light energy to electrical signals simplifies the overall measurement system while maintaining high precision, as the measurement is performed directly at the point of interest rather than requiring complex indirect measurement methods.
3Manufacturing precision
If surface temperature measurement is attempted during thermal processing, then manufacturing precision is improved, but difficulty of detecting and measuring increases
Solution Approach 1:
The patent implements feedback by using the measured light energy values to calculate and determine the surface temperature of the substrate during thermal processing. The measuring part continuously monitors the light energy from the flash lamps, and this information is fed back to calculate the actual surface temperature achieved. This feedback mechanism allows precise temperature control without requiring direct surface temperature measurement, thus resolving the contradiction between manufacturing precision and measurement difficulty.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate measurement of light energy and surface temperature during thermal processing, detecting lamp deterioration and preventing processing failures, thus improving yield and reducing manufacturing costs.
Implementation Method 1
Japanese Patent Application Laid Open Gazette No. 2002-357660 discloses a calorimeter for converting light energy absorbed by a black body in a sensor into an electrical signal which has a property of fast response
Implementation Method 2
converting light energy absorbed by a black body in a sensor into an electrical signal
Implementation Method 3
a light emitting part (5) for emitting light to a substrate (9) inside the chamber body (6)
Implementation Method 4
heating the substrate in a chamber with halogen lamps or the like to raise the temperature thereof
Data Source
AI summary
A thermal processing apparatus (1) comprises a chamber body (6), a holding part (7) for holding a substrate (9) inside the chamber body (6), a light emitting part (5) for heating the substrate (9) through light irradiation and a light measuring part (2) for measuring light energy. The light measuring part (2) comprises a calorimeter (24) disposed outside the chamber body (6), a light guide structure (20) for guiding the light inside the chamber body (6) to the calorimeter (24) and a calculation part (25) for performing computations on the basis of an output of the calorimeter (24). In the thermal processing apparatus (1), by measuring the light from the light emitting part (5) by the calorimeter (24), it is possible to measure the energy of light emitted from the light emitting part (5) during thermal processing inside chamber body (6) and obtain a surface temperature of the substrate (9) by the calculation part (25).