Flash-Treated ITO Coating for Insulating Glass

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Solution Overview

Problem

Existing transparent electrically conductive oxide coatings, particularly indium tin oxide (ITO) films, face challenges in achieving a balance of electrical conductivity and visible transmission, especially when subjected to flash treatment, and often require conventional heat treatments that can lead to sodium migration and substrate deformation.

Innovation Solution

A method involving sputter deposition of indium tin oxide films followed by ultra-high-power flash treatment, which crystallizes the film, increases carrier concentration, reduces sheet resistance, and maintains low sodium concentration, while keeping the substrate cool to prevent deformation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional heat treatment (furnace heating, laser irradiation, flame treatment) is applied to ITO coatings to improve electrical conductivity, then carrier concentration increases and sheet resistance decreases, but substrate temperature rises causing sodium migration and substrate deformation

Engineering Contradiction:
Improveelectrical conductivityVSAvoidsubstrate deformation and sodium migration
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies flash lamp treatment which delivers thermal energy in extremely short pulses (milliseconds), heating the ITO coating rapidly to high temperatures for crystallization and carrier activation, then cooling equally rapidly. This periodic thermal action achieves the desired electrical conductivity improvement without sustained high substrate temperature that would cause sodium migration and deformation

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The patent changes the temporal parameters of heat treatment from continuous or long-duration heating to ultra-short pulse heating. By controlling the duration and intensity of flash lamp pulses, the coating reaches temperatures sufficient for crystallization and carrier generation while the substrate remains relatively cool, thus improving electrical conductivity without substrate damage

Inventive Principle:
Principle #35Parameter changes

2Reliability

If ITO coating thickness is increased to reduce sheet resistance and improve electrical conductivity, then electrical conductivity improves, but visible transmittance decreases

Engineering Contradiction:
Improveelectrical conductivityVSAvoidvisible transmittance
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent changes the crystalline structure and optical bandgap parameters of the ITO coating through flash treatment. This transforms the coating from an amorphous to crystalline state, increasing carrier concentration and electrical conductivity while maintaining optical transparency. The treatment modifies the electronic structure rather than simply increasing thickness, thus improving conductivity without sacrificing visible transmittance

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure where the flash-treated ITO coating exhibits enhanced properties combining high electrical conductivity and high visible transmittance. The treatment produces a unique microstructure with specific grain size, phase composition, and optical bandgap that achieves the desired balance between electrical and optical properties

Inventive Principle:
Principle #40Composite materials

3Reliability

If flash treatment power is increased to improve crystallization and carrier concentration, then electrical conductivity improves, but coating morphology and surface roughness may deteriorate

Engineering Contradiction:
Improveelectrical conductivityVSAvoidsurface roughness and morphology
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent optimizes multiple parameters of the flash treatment process including pulse duration, energy density, number of pulses, and interval between pulses. By carefully controlling these parameters, the treatment achieves sufficient thermal energy for crystallization and carrier activation while limiting excessive surface roughening or morphological degradation that would occur with higher power settings

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The resulting flash-treated ITO films exhibit improved electrical conductivity, reduced visible absorption, and maintained substrate integrity, with a thickness of 1,050 Å to 1,800 Å, surface roughness of 1.5 nm to 3 nm, and monolithic visible transmittance of 0.86 to 0.92, suitable for multiple-pane insulating glazing units.

Implementation Method 1

Flash lamp treatment is beneficial in that it heat treats a large area of the coating with a single flash while the underlying substrate remains relatively cool

Methodology Applied
Scientific EffectFlash lamp treatment: Heating

Implementation Method 2

which crystallizes the film, increases carrier concentration, reduces sheet resistance

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Implementation Method 3

A method involving sputter deposition of indium tin oxide films

Methodology Applied
Scientific EffectSputter deposition: Sputtering

Data Source

PatentEP3371122B1Insulating glass unit transparent conductive coating technology
Publication Date: 2021.08.11 CARDINAL CG CO
  • EP3371122B1 patent drawingFigure 1
  • EP3371122B1 patent drawingFigure 2
  • EP3371122B1 patent drawingFigure 3

AI summary

The invention provides flash-treated transparent conductive coatings based on indium tin oxide. Some embodiments provide a multiple-pane insulating glazing unit that includes two glass panes and a between-pane space. The two glass panes respectively define two opposed external pane surfaces. At least one of the two external pane surfaces has a flash-treated transparent conductive oxide coating.