Flash Vaporization of Organic Materials for OLED Deposition

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Solution Overview

Problem

Existing physical vapor deposition methods face challenges in controlling the deposition rate and film thickness, especially for temperature-sensitive organic materials, leading to material degradation, limited throughput, and difficulty in co-depositing multiple materials with different vaporization rates, which restricts the complexity and performance of organic light-emitting diode (OLED) devices.

Innovation Solution

A method involving flash vaporization of organic materials using quantized units in an evaporator, directed through an area vapor dispenser with multiple apertures, allowing precise control over the deposition process without requiring multiple sources or precise temperature control, enabling efficient deposition of multiple components and layers with reduced material exposure to high temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional continuous heating vaporization is used, then steady vaporization rate is achieved, but material degradation occurs due to prolonged exposure to high temperatures

Engineering Contradiction:

Improvematerial stabilityVSAvoidexposure time to high temperature

Core Design Contradiction:

ReliabilityVSDuration of action of moving object

Solution Approach 1:

The patent implements periodic pulsed heating instead of continuous heating, where the heater is activated in short pulses to vaporize material only when needed. This periodic action reduces the total time material is exposed to high temperatures, preventing degradation while maintaining adequate vaporization rates for deposition.

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The patent uses rapid flash vaporization where material is quickly heated and vaporized in a short time interval, then the heating is stopped. This rushing through the vaporization process minimizes the duration of high-temperature exposure, allowing complete vaporization before degradation can occur.

Inventive Principle:

Principle #21Skipping (Rushing through)

2Adaptability or versatility

If multiple separate sources are used to deposit materials with different vaporization rates, then co-deposition capability is improved, but device complexity increases

Engineering Contradiction:

Improveco-deposition capabilityVSAvoidnumber of vaporization sources

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple materials with different vaporization rates into a single mixed charge placed in one vaporization source. By merging the materials and using controlled pulsed heating, the system achieves co-deposition capability without requiring multiple separate sources, thereby reducing device complexity while maintaining versatility.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single vaporization source is designed to handle multiple materials with different properties through universal pulsed heating control. The heater can adjust pulse duration and intensity to accommodate various materials, making one source perform the function of multiple specialized sources.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Reliability

If small quantities of material are loaded in sources to avoid degradation, then material stability is maintained, but vaporization rate and throughput are limited

Engineering Contradiction:

Improvematerial stabilityVSAvoidvaporization rate

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent implements continuous pulsed heating cycles where material is repeatedly vaporized and deposited. The heater operates in continuous cycles of heating and cooling, maintaining a steady supply of vapor to the substrate without requiring large amounts of material in the source at any one time. This continuous action sustains high vaporization rates while keeping source material quantities small.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables extended operation with reduced material degradation, higher vaporization rates, precise thickness control, and the ability to deposit complex multilayer structures, enhancing the performance and efficiency of OLED manufacturing while conserving materials and simplifying the deposition process.

Implementation Method 1

heating an evaporator to a temperature capable of completely evaporating the evaporant to be deposited

Methodology Applied

Scientific EffectEvaporation: Evaporation

Implementation Method 2

directing the vaporized evaporant from the evaporator to the area vapor dispenser so that the evaporant is dispensed through the apertures to deposit the layer on the substrate area

Methodology Applied

Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS7951421B2Vapor deposition of a layer

Publication Date: 2011.05.31 GLOBAL OLED TECHNOLOGY LLC

AI summary

A method of depositing a layer onto a substrate, comprising heating an evaporator to a temperature capable of completely evaporating the evaporant to be deposited, dispensing into the evaporator one or more quantized units of the evaporant where the evaporant is completely vaporized, providing an area vapor dispenser having a plurality of apertures, and directing the vaporized evaporant from the evaporator to the area vapor dispenser so that the evaporant is dispensed through the apertures to deposit the layer on the substrate.