Flat-Coil Beam Deflector Layout for Low-Aberration Imaging

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Solution Overview

Problem

Conventional deflectors for charged particle beam apparatuses, such as electron microscopes, face challenges in reliably inspecting and imaging samples at high resolution with minimal aberrations, due to complex wiring and manufacturing difficulties.

Innovation Solution

The use of flat coils arranged in pairs on opposite sides of the deflector axis, allowing for easier manufacturing and reduced aberrations, improves the deflection of charged particle beams in charged particle beam apparatuses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If conventional deflectors use saddle coils, toroidal coils or complex wirings, then beam deflection function is achieved, but manufacturing complexity and production difficulty increase

Engineering Contradiction:

Improveease of manufactureVSAvoiddevice complexity

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The patent replaces conventional mechanical coil structures (saddle coils, toroidal coils) with flat coils that have simplified windings. This substitution maintains the electromagnetic deflection function while dramatically reducing manufacturing complexity. The flat coil design allows for easier winding processes and simpler assembly, directly addressing the contradiction between ease of manufacture and device complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the geometric parameters of the coil structure from three-dimensional complex shapes (saddle, toroidal) to flat two-dimensional configurations. This parameter change simplifies the manufacturing process while preserving the essential magnetic field generation capability needed for beam deflection, thereby resolving the contradiction between manufacturing ease and device complexity.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If conventional deflectors use complex coil structures, then beam deflection is achieved, but manufacturing precision and reproducibility decrease

Engineering Contradiction:

Improvemanufacturing precisionVSAvoiddevice complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

By substituting complex coil structures with flat coils, the patent achieves more consistent and reproducible manufacturing. The simplified flat coil geometry allows for better control over winding parameters, leading to higher manufacturing precision and more consistent performance across produced units, while simultaneously reducing overall device complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If conventional deflectors are used, then beam deflection function is provided, but beam aberrations and astigmatism increase

Engineering Contradiction:

Improveimaging resolutionVSAvoidbeam aberrations

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The replacement of conventional coils with flat coils creates a more uniform magnetic field distribution, which reduces beam aberrations and astigmatism. This substitution improves the reliability of imaging by maintaining better beam quality, while the simpler coil structure inherently reduces the sources of field distortion that cause harmful aberrations.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

4Ease of manufacture

If conventional deflectors are used, then charged particle beam deflection is achieved, but production costs increase

Engineering Contradiction:

Improveproduction costVSAvoidmanufacturing precision

Core Design Contradiction:

Ease of manufactureVSManufacturing precision

Solution Approach 1:

The flat coil design reduces material requirements and simplifies the manufacturing process, leading to lower production costs. At the same time, the simplified geometry enables more precise manufacturing control, so manufacturing precision is improved rather than degraded. This dual benefit resolves the contradiction between production cost and manufacturing precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces production costs, improves beam separation between primary and signal charged particle beams, and enhances the matching of manufactured charged particle beam apparatuses, resulting in improved imaging resolution and reduced astigmatism.

Implementation Method 1

The deflector includes a plurality of flat coils including two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector

Methodology Applied

Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

configured to deflect a charged particle beam in a direction perpendicular to the axis

Methodology Applied

Scientific EffectLorentz force: Lorentz Force

Data Source

PatentUS20250166958A1Deflector for a charged particle beam apparatus, deflecting system, charged particle beam apparatus, and method of fabricating a deflector

Publication Date: 2025.05.22 ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK GMBH

AI summary

A deflector for a charged particle beam apparatus is described. The deflector has an axis and is configured to deflect a charged particle beam in a direction perpendicular to the axis, the deflector including a plurality of flat coils including two pairs of flat coils, wherein the two pairs of flat coils are arranged on opposite sides about the axis of the deflector.