Flat Head Mask Frame Supports for Heavy Load Alignment

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Solution Overview

Problem

Conventional ball transfer units (BTUs) cause deformations and scratches on heavy mask frames due to concentrated pressure points, lacking a sufficient contact surface area for proper load alignment during electronic device manufacturing.

Innovation Solution

The introduction of flat head units with a larger contact surface area, incorporating a tapered and cylindrical design, and a centering mechanism with tension springs to support the load and enable free movement in the X-Y plane, reducing deformation and stress on the mask frames.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If ball transfer units (BTUs) are used to support mask frames, then the mask frames can be supported and moved, but the concentrated pressure points cause deformations and scratches on the mask frames

Engineering Contradiction:
Improvemask frame support and movementVSAvoiddeformations and scratches on mask frames
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The support function is segmented from point-contact balls to distributed flat head contacts, dividing the pressure across multiple points on the flat head surface rather than concentrating it at single ball contact points

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The contact interface transitions from zero-dimensional point contacts (balls) to two-dimensional surface contacts (flat heads), increasing the contact area dimension and distributing pressure across a larger surface

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If conventional support units with small contact area are used, then the structure is simple, but the contact surface area is insufficient for proper load alignment

Engineering Contradiction:
Improvesupport unit structureVSAvoidcontact surface area
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The contact surface transitions from point-like (zero-dimensional) to planar (two-dimensional), providing sufficient contact area for proper load alignment while maintaining a relatively simple cylindrical or conical geometric form

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-affected harmful factors

If flat head units with larger contact surface area are used, then deformation and stress on mask frames are reduced, but the device structure becomes more complex

Engineering Contradiction:
Improvedeformation and stress on mask framesVSAvoidflat head unit structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The flat head unit is segmented into modular components (case, flat head, tension springs, centering mechanism) that can be independently designed and assembled, managing complexity through functional decomposition

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The flat head unit performs multiple functions simultaneously: load support, stress distribution, centering, and free movement enablement, reducing the need for separate components and managing overall system complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Device complexity

If conventional support units are used, then the structure is simple, but the alignment accuracy is insufficient under heavy loads

Engineering Contradiction:
Improvesupport unit structureVSAvoidalignment accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The flat head provides a localized high-quality contact surface with optimal pressure distribution characteristics, creating a specific zone of improved stress distribution and alignment precision where it is most needed

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The contact geometry parameters are changed from spherical to flat, altering the pressure distribution profile and enabling better alignment accuracy under heavy load conditions

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The flat head units effectively prevent deformations and markings on mask frames, enhance alignment accuracy, and extend the life cycle of the units under heavy loads, supporting loads up to 100 kg at elevated temperatures.

Implementation Method 1

Conventional ball transfer units (BTUs) cause deformations and scratches on heavy mask frames due to concentrated pressure points

Methodology Applied
Scientific EffectPressure distribution:

Implementation Method 2

incorporating a tapered and cylindrical design, and a centering mechanism with tension springs to support the load and enable free movement in the X-Y plane

Methodology Applied
Scientific EffectSpring tension: Spring

Data Source

PatentUS12140168B2Flat head units for heavy load alignment
Publication Date: 2024.11.12 APPLIED MATERIALS INC
  • US12140168B2 patent drawing
  • US12140168B2 patent drawing
  • US12140168B2 patent drawing

AI summary

A mask frame support unit includes a case, a protruding body extending below the case, and a station having a flat head disposed above the case. The protruding body includes a tapered region and a cylindrical region. The tapered region includes a first end having a first diameter coupled to the case and comprising a second end having a second diameter opposite the first end. The second diameter is less than the first diameter, and the tapered region is coupled to the cylindrical region at the second end. The case houses a number of components including an upper receiving plate in contact with the station, a lower receiving plate disposed underneath the upper receiving plate, a flat head unit movement support mechanism disposed between the lower receiving plate and the body, and a centering component.