Flat Panel Detector Compensation Structure for Coupling Capacitance
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Solution Overview
Problem
Flat panel detectors in X-ray imaging systems face challenges in achieving uniformity in imaging due to coupling capacitance effects, which affect the accuracy and quality of the detection images.
Innovation Solution
Incorporating a compensation semiconductor material layer with spaced compensation structures between the gate and gate insulating layer of detection transistors, forming a Schottky contact to reduce the influence of coupling capacitance and improve imaging detection voltage uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional detection transistor structure is used, then the device complexity is low, but the imaging uniformity deteriorates due to coupling capacitance effects
Solution Approach 1:
A compensation semiconductor material layer is introduced as an intermediary between the gate and gate insulating layer of the detection transistor. This layer forms a compensation structure that generates a compensation electric field to counteract the coupling capacitance effect, thereby improving imaging uniformity without fundamentally changing the transistor operation principle
Solution Approach 2:
The compensation semiconductor material layer is positioned specifically between the gate and gate insulating layer, creating a localized compensation structure only where the coupling capacitance effect occurs. This targeted approach improves imaging uniformity at the affected location without requiring global structural changes to the entire detector
2Measurement precision
If the detection transistor is continuously on, then the detection speed is fast, but the imaging noise increases due to continuous charge accumulation
Solution Approach 1:
The detection transistor is operated in periodic cycles: during the exposure period, the transistor is turned on to accumulate charge from the photodiode; during the readout period, the transistor is turned off to prevent additional noise accumulation. This periodic switching maintains both detection speed and signal-to-noise ratio by separating the charge accumulation phase from the readout phase
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the uniformity of imaging detection voltage and gray scale uniformity of the formed detection images by eliminating the impact of coupling capacitance, resulting in improved image quality.
Implementation Method 1
Incorporating a compensation semiconductor material layer with spaced compensation structures between the gate and gate insulating layer of detection transistors, forming a Schottky contact to reduce the influence of coupling capacitance
Implementation Method 2
the image sensor is composed of a pixel array formed by a photodiode and a thin film transistor (TFT) switch, and converts the visible light generated by the scintillator into the electrical signal
Implementation Method 3
The scintillator absorbs the X-rays and converts the X-rays into visible light
Data Source
AI summary
The present disclosure discloses a flat panel detector, a driving method, a driving device and a flat panel detection device. The flat panel detector includes: a base substrate, and a plurality of detection units located on the base substrate; each of the detection units includes a photodiode and a detection transistor; the flat panel detector further includes: a compensation semiconductor material layer including a plurality of compensation structures mutually spaced; each detection transistor is correspondingly provided with a compensation structure, and the compensation structure is located between a gate and a gate insulating layer of the corresponding detection transistor.