Flat Panel Display Inspection System Using Electron Beam and Optical Detection
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Solution Overview
Problem
Current inspection systems for flat panel displays, such as LCD and OLED, face limitations in size due to vacuum scanning electron microscopes, leading to complex processes, increased costs, and image distortion from charging effects, with automated optical inspections being sensitive to external vibrations and requiring separate installations.
Innovation Solution
An integrated inspection system combining automated optical inspection, scanning electron microscopy, and optical microscopy, allowing for defect detection and analysis outside a vacuum chamber, with a membrane to transmit electron beams and signals, and vibration control to minimize external noise, enabling inspection of large-sized objects without size limitations and contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the size of the vacuum chamber is increased to accommodate large flat panel displays, then the inspection capability for large-sized objects is improved, but secondary electrons or back-scattered electrons cause interference by charging effect and carbon contamination is generated
Solution Approach 1:
The system divides the inspection process into two independent stages: automated optical inspection for initial defect detection, and scanning electron microscope inspection for detailed analysis. This segmentation allows each system to operate within its optimal parameters without the harmful effects associated with large vacuum chambers.
Solution Approach 2:
A transferring device acts as an intermediary mechanism that moves the inspection object between the automated optical inspection system and the scanning electron microscope. This intermediary enables seamless transition between inspection stages without requiring the object to be placed inside a large vacuum chamber for the entire process.
2Measurement precision
If automated optical inspection and vacuum scanning electron microscope are used separately, then defect detection and analysis capabilities are improved, but the inspection process becomes complicated and space occupied increases
Solution Approach 1:
The system merges the automated optical inspection device and the scanning electron microscope into a single integrated inspection system. Both inspection devices are mounted on a common transferring device that can move them to positions over the same stage, allowing seamless transition between inspection methods without removing the object or complicating the process.
Solution Approach 2:
The transferring device serves multiple functions: it supports the inspection object on the stage, carries the automated optical inspection device, and transports the scanning electron microscope. This multi-functional design reduces the number of separate components needed and simplifies the overall inspection process.
3Productivity
If automated optical inspection is used, then defect detection is enabled, but detection power is limited due to sensitivity to external vibration
Solution Approach 1:
The automated optical inspection is performed first as a preliminary step to detect defects and determine their locations. This preliminary action guides the subsequent detailed inspection by the scanning electron microscope, ensuring that detection resources are focused on areas of interest rather than scanning the entire object.
Solution Approach 2:
The system uses feedback from the automated optical inspection results to guide the scanning electron microscope inspection. Defect locations identified by the optical inspection are transmitted to control the microscope's inspection positions, creating a feedback loop that optimizes detection precision while maintaining efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system reduces inspection time, prevents image distortion, minimizes contamination, and improves detection power by allowing large-sized flat panel displays to be inspected without damage, reducing costs and improving yield, while controlling external vibrations and noise.
Implementation Method 1
a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam
Implementation Method 2
secondary electrons (SE) or back-scattered electrons (BSE) from an inspection object positioned in the vacuum chamber cause interference
Implementation Method 3
secondary electrons (SE) or back-scattered electrons (BSE) from an inspection object positioned in the vacuum chamber cause interference
Implementation Method 4
an automated optical inspection device for detecting defect of an inspection object by using a light
Implementation Method 5
a membrane to transmit electron beams and signals
Data Source
AI summary
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.