Flexible Bridge Pad for Substrate Support Stability
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Solution Overview
Problem
Existing substrate handling technologies face challenges in securely supporting and conveying substrates like silicon wafers without causing damage or displacement, particularly due to slippage and uneven support.
Innovation Solution
A substrate support device featuring a blade with flexible pads that include a first fixed member, a second fixed member, and a bridge, where the bridge is inclined and connects the two members to securely support the substrate's outer circumference, minimizing slippage and damage by adjusting its flexibility based on the substrate's size and weight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a rigid pad structure is used to support the substrate, then structural strength is improved, but adaptability to different substrate sizes and weights deteriorates
Solution Approach 1:
The pad structure transitions from a rigid configuration to a dynamic one by introducing a hinge mechanism. The hinge allows the pad to rotate and adjust its angle according to the substrate's weight and size, enabling the same pad structure to adapt to different substrates while maintaining sufficient support strength.
Solution Approach 2:
The pad's support angle is changed as a variable parameter based on substrate characteristics. By adjusting the angle of the pad relative to the blade through the hinge mechanism, the system optimizes the distribution of support force according to the substrate's weight and dimensions, resolving the contradiction between fixed structural strength and variable adaptability requirements.
2Measurement precision
If the pad is fixed rigidly to the blade, then positioning precision is improved, but flexibility in supporting different substrate positions deteriorates
Solution Approach 1:
The pad is connected to the blade through a hinge instead of rigid fixation, creating a dynamic connection that allows angular adjustment. This enables the pad to position itself optimally for different substrate locations while the hinge mechanism maintains precise control over the pad's position and orientation.
Solution Approach 2:
The pad assembly is segmented into multiple components (blade, hinge, pad) that can move independently. This segmentation allows the pad to adjust its position and angle relative to the blade, providing flexibility for different substrate positions while maintaining positioning precision through controlled movement.
3Device complexity
If a simple pad structure is used, then device complexity is reduced, but substrate support stability deteriorates
Solution Approach 1:
The hinge mechanism introduces dynamic adjustment capability to the pad structure without significantly increasing complexity. The single hinge joint allows the pad to adapt to substrate weight variations and maintain stability, achieving enhanced support performance with minimal additional structural elements.
Solution Approach 2:
The pad structure with hinge automatically adjusts its angle and position in response to substrate weight and size, providing self-regulating support stability. The system uses the substrate's own characteristics (weight, dimensions) to determine the optimal pad configuration, eliminating the need for complex external control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents substrate displacement and damage by ensuring secure, flexible support that aligns with the substrate's shape, enhancing handling precision and safety in conveyance and alignment processes.
Implementation Method 1
The bridge is flexible and connects the first fixed member and the second fixed member to support the outer circumference portion of the substrate
Data Source
AI summary
A substrate support device includes a blade and at least one pad provided on the blade to support a substrate. The pad includes a first fixed member, a second fixed member, and a bridge. The first fixed member is provided at an outer portion of the blade. The outer portion is located outside an outer circumference portion of the substrate when the substrate is supported on the pad. The second fixed member is provided at an inner portion of the blade. The inner portion is under the substrate when the substrate is supported on the pad. The bridge is flexible and connects the first fixed member and the second fixed member to support the outer circumference portion of the substrate. An upper surface of the bridge is inclined downward from the first fixed member toward the second fixed member when the substrate is not supported on the pad.