Flexible Contactor Structure for Miniaturized Semiconductor Inspection
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Solution Overview
Problem
Conventional interconnect structures, such as pogo pins, face challenges in miniaturization, precision, and durability during semiconductor inspections, requiring improved mechanical and electrical connection designs that can adapt to various parts and withstand repeated use without deformation or damage.
Innovation Solution
A flexible contactor composed of first and second elastic parts with different physical properties, including hardness, Young's modulus, and resistivity, formed with conductive particles and manufactured using a method involving aligned molds and magnetic flux concentration to create a deformable and conductive connection capable of varying shapes and lengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional pogo pin structure is used, then electrical connection is achieved through elastic force, but miniaturization and precision improvement are limited
Solution Approach 1:
The contactor is divided into multiple elastic parts (first elastic part, second elastic part) with different physical properties, allowing each segment to be optimized independently for specific functions such as contact pressure, conductivity, and deformation characteristics, thereby improving inspection precision while managing structural complexity
Solution Approach 2:
Different elastic parts are assigned different physical properties (hardness, Young's modulus, resistivity) according to their specific functional requirements - for example, the first elastic part contacting the pad may have different properties than the second elastic part, enabling localized optimization for both precision and structural efficiency
2Length of moving object
If the contactor is miniaturized to match smaller pad pitch, then adaptation to miniaturization trend is achieved, but deformation and damage from repeated use increase
Solution Approach 1:
The contactor uses composite structure with multiple elastic parts having different physical properties, combining materials with appropriate hardness, elasticity, and conductivity to create a miniaturized structure that maintains high reliability and resistance to deformation from repeated use
Solution Approach 2:
The elastic parts are designed to be deformable, allowing the miniaturized contactor to dynamically adapt to contact forces during repeated use, absorbing stress and preventing permanent deformation while maintaining electrical connection
3Manufacturing precision
If the contactor is designed for high precision test operation, then inspection precision improves, but manufacturing complexity increases
Solution Approach 1:
Multiple elastic parts are integrally formed through a single molding process that simultaneously shapes all components, combining what would otherwise require multiple manufacturing steps into one operation, thereby achieving high precision test operation capability while maintaining manufacturing ease
4Length of stationary object
If the contactor is made long to connect distant pads, then electrical connection range increases, but manufacturing difficulty increases
Solution Approach 1:
The long contactor is segmented into multiple elastic parts connected in parallel, where each segment can be independently formed and controlled during manufacturing, reducing the difficulty of producing long structures while maintaining the required length for connecting distant pads
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The flexible contactor enhances inspection precision, supports miniaturization trends, and reduces deformation and damage by allowing customizable mechanical and electrical properties, enabling effective electrical connection and easy manufacturing of long shapes while maintaining a fine cross-sectional area.
Implementation Method 1
aligning a magnetic flux concentration member including magnetic pads at positions corresponding to the first receptor and the second receptor, in the first mold and the second mold which are aligned with each other
Data Source
AI summary
A flexible contactor that electrically connects a pad of an inspection target object with a pad of an inspection device includes, a first elastic part configured to contain a first conductive particle and be formed elastically deformable; and a second elastic part, which is connected in parallel to the first elastic part in a longitudinal direction, configured to contain a second conductive particle and be formed elastically deformable. The first elastic part and the second elastic part are different from each other in at least one of physical properties including hardness, Young's modulus, and resistivity.