Flexible Display Substrate With Multilayer Barrier Stress Control

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Solution Overview

Problem

Conventional glass substrates for flexible displays are prone to breaking and lack flexibility, while plastic substrates allow high moisture and oxygen penetration, making them unsuitable for high-temperature processes and reducing the lifespan of electronic devices.

Innovation Solution

A flexible substrate with a plastic substrate having a glass transition temperature between 350° C. to 500° C., combined with a multi-layer barrier layer composed of alternately stacked silicon oxide and silicon nitride layers, providing excellent oxygen and moisture blocking characteristics and uniform film stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a glass substrate is used for a display, then the display can be thin and light, but the glass substrate easily breaks and lacks flexibility

Engineering Contradiction:
Improvesubstrate strengthVSAvoidsubstrate reliability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent uses a composite structure consisting of a plastic substrate combined with a multi-layer barrier layer (alternating silicon oxide and silicon nitride layers). This composite material approach provides both the flexibility needed for reliable operation and the protective characteristics to prevent breakage, while the barrier layers prevent moisture and oxygen penetration that would otherwise degrade the display components.

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If a plastic substrate is used for a display, then the display achieves flexibility, but the plastic substrate has high moisture and oxygen penetration

Engineering Contradiction:
Improvesubstrate flexibilityVSAvoidmoisture and oxygen penetration
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The patent combines a plastic substrate with a multi-layer barrier layer structure consisting of alternating silicon oxide and silicon nitride layers. The plastic substrate provides the necessary flexibility for the display to be bent and conform to curved surfaces, while the barrier layers form a protective composite structure that blocks moisture and oxygen penetration, preventing degradation of the electronic components.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent employs a plastic substrate as a flexible shell that enables the display to achieve curvature and flexibility. This flexible substrate is then combined with thin film barrier layers to create a composite structure that maintains flexibility while providing protection against environmental factors.

Inventive Principle:
Principle #30Flexible shells and thin films

3Adaptability or versatility

If a plastic substrate is used for a display, then the display achieves flexibility, but the plastic substrate is not suitable for high temperature processes

Engineering Contradiction:
Improvesubstrate flexibilityVSAvoidhigh temperature process resistance
Core Design Contradiction:
Adaptability or versatilityVSTemperature

Solution Approach 1:

The patent creates a composite structure where the plastic substrate provides flexibility for the display to be bent and conform to curved surfaces, while the multi-layer barrier layer (alternating silicon oxide and silicon nitride layers) provides thermal stability and resistance to high temperature processes. This composite approach allows the flexible substrate to withstand manufacturing processes without deforming.

Inventive Principle:
Principle #40Composite materials

4Object-affected harmful factors

If a barrier layer with high oxygen and moisture blocking characteristics is added to a plastic substrate, then protection is improved, but the device complexity increases

Engineering Contradiction:
Improveoxygen and moisture blockingVSAvoidsubstrate structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent employs a multi-layer composite barrier structure with alternating silicon oxide and silicon nitride layers. This composite barrier provides superior oxygen and moisture blocking characteristics compared to single-layer structures. The specific arrangement of layers with different material properties creates an effective barrier against environmental degradation while managing the complexity through a systematic layered approach.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the creation of a thin, flexible display substrate that maintains stability under high temperatures, prevents moisture and oxygen penetration, and ensures the longevity of electronic devices without affecting the thin film transistor or electronic device performance.

Implementation Method 1

the plastic substrate has high level of moisture and oxygen penetration

Methodology Applied
Scientific EffectPermeation: Permeation

Implementation Method 2

having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer

Methodology Applied
Scientific EffectFilm stress:

Data Source

PatentUS11978803B2Flexible display and method of manufacturing the same
Publication Date: 2024.05.07 SAMSUNG DISPLAY CO LTD
  • US11978803B2 patent drawing
  • US11978803B2 patent drawing
  • US11978803B2 patent drawing

AI summary

A substrate for a flexible display is disclosed. The substrate has a film stress range that does not affect an electronic device such as a thin film transistor, and includes a barrier layer having excellent oxygen and moisture blocking characteristics, and a method of manufacturing the substrate. The substrate includes; a plastic substrate having a glass transition temperature from about 350° C. to about 500° C.; and a barrier layer disposed on the plastic substrate, having a inti layer structure, wherein at least one silicon oxide layer and at least one silicon nitride layer are alternately stacked on each other, and having a film stress from about −200 MPa to about 200 MPa due to the at least one silicon oxide layer and the at least one silicon nitride layer.