Flexible Display Substrate Separation via Electrostatic Debonding

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Solution Overview

Problem

The challenge in manufacturing flexible display apparatuses is the damage to flexible substrates during the process of isolating them from support substrates, which degrades the quality of the display apparatus due to the use of lasers or other methods.

Innovation Solution

A method involving the formation of a metal oxide layer with positive charges on the support substrate, followed by a debonding layer with negative charges, such as graphene oxide, to facilitate the separation of the flexible substrate from the support substrate without causing damage, using techniques like spray coating or spin coating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If laser is used to isolate flexible substrate from support substrate, then separation is achieved, but flexible substrate is damaged

Engineering Contradiction:

Improveseparation efficiencyVSAvoidsubstrate damage

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

A debonding layer is introduced as an intermediary between the flexible substrate and support substrate. This debonding layer includes charges opposite to those in the metal oxide layer, enabling controlled separation without direct laser contact with the flexible substrate, thereby preventing substrate damage while maintaining separation efficiency

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of manufacture

If flexible substrate is placed on support substrate for manufacturing, then handling is facilitated, but separation process causes damage

Engineering Contradiction:

Improvehandling easeVSAvoidsubstrate integrity

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The debonding layer with opposite charges is formed in advance on the metal oxide layer before the flexible substrate is placed. This preliminary charge configuration ensures that when separation is needed, the flexible substrate can be cleanly detached without damage, preserving substrate integrity while maintaining manufacturing ease

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces substrate damage and improves the quality of the display apparatus by ensuring a controlled and gentle separation process, lowering equipment area and processing time requirements, and reducing costs.

Implementation Method 1

forming a metal oxide layer with positive charges on the support substrate, followed by a debonding layer with negative charges, such as graphene oxide, to facilitate the separation of the flexible substrate from the support substrate

Methodology Applied

Scientific EffectElectrostatic repulsion: Ion Repulsion/Attraction

Implementation Method 2

using techniques like spray coating or spin coating

Methodology Applied

Scientific EffectSpin coating: Spin Coating

Implementation Method 3

using techniques like spray coating or spin coating

Methodology Applied

Scientific EffectSpray coating: Fluid Spray

Data Source

PatentUS11588141B2Display apparatus and method of manufacturing the same

Publication Date: 2023.02.21 SAMSUNG DISPLAY CO LTD

AI summary

In a method of manufacturing a display apparatus, the method includes: preparing a support substrate; forming a metal oxide layer on a surface of the support substrate, the metal oxide layer comprising first charges; forming a debonding layer on a surface of the metal oxide layer, the debonding layer comprising second charges opposite to the first charges; forming a flexible substrate on a surface of the debonding layer; forming a display element and a thin film encapsulation layer on a surface of the flexible substrate, the display element comprising a thin film transistor and an organic light-emitting diode; and isolating the flexible substrate from the support substrate.