Flexible Display Sacrificial Layer Laser Separation
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Solution Overview
Problem
Existing flexible display manufacturing methods face challenges in achieving reliable separation of substrates without damaging the flexible substrate, and in preventing moisture and oxygen ingress, which can affect the touch array's reliability and transparency.
Innovation Solution
A method involving a sacrificial layer formed with materials like oxidized molybdenum (MoO3), lead zirconate titanate (PZT), or amorphous silicon (a-Si) using atomic layer deposition or chemical vapor deposition, which is selectively removed using laser energy to separate substrates and prevent moisture and oxygen exposure, while a protective layer secures the touch array's integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a sacrificial layer is used to separate substrates, then substrate separation is achieved, but moisture and oxygen ingress may damage the touch array
Solution Approach 1:
A protective layer is formed on the touch array before the sacrificial layer is removed. This preliminary protective action ensures that when the sacrificial layer is subsequently removed via laser irradiation, the touch array is already protected from moisture and oxygen ingress, preventing damage during the separation process
Solution Approach 2:
The protective layer acts as an intermediary barrier between the touch array and the harmful environment. It is formed between the touch array and the sacrificial layer, and remains in place during sacrificial layer removal to mediate protection against moisture and oxygen while allowing the separation process to proceed
2Productivity
If laser energy is used to remove the sacrificial layer, then substrate separation is achieved, but the flexible substrate may be damaged
Solution Approach 1:
The protective layer has different properties at different locations: it is positioned specifically between the touch array and the sacrificial layer to provide localized protection. This local quality ensures that only the necessary area is protected during laser irradiation, allowing efficient separation while protecting the flexible substrate from damage
Solution Approach 2:
The protective layer serves as a cushioning barrier formed beforehand to absorb or deflect the laser energy that would otherwise damage the flexible substrate. This prior cushioning allows the laser to effectively remove the sacrificial layer while the protective layer absorbs the harmful effects, preventing substrate damage
3Ease of operation
If the second sacrificial layer is removed to separate the supporting substrate, then substrate separation is achieved, but the touch array interface may become rough
Solution Approach 1:
The protective layer is formed as a thin film structure on the touch array. This thin film provides a smooth interface that maintains manufacturing precision while allowing the sacrificial layer to be removed underneath. The thin film structure flexes with the substrate separation process without compromising interface smoothness
Solution Approach 2:
The protective layer acts as an intermediary between the touch array and the removed sacrificial layer. It maintains a smooth interface during the separation process, preventing roughness from developing at the touch array interface while still allowing complete separation of the supporting substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures reliable separation of substrates, maintains transparency, and enhances the reliability of the touch array by minimizing gas exposure and surface roughness effects, thereby improving the overall manufacturing process.
Implementation Method 1
irradiating laser energy onto the first sacrificial layer to remove the first sacrificial layer and to separate the first supporting substrate from the base substrate
Implementation Method 2
irradiating laser energy onto the first sacrificial layer to remove the first sacrificial layer
Implementation Method 3
irradiating laser energy onto the second sacrificial layer to separate interfaces of the second supporting substrate and the second sacrificial layer from each other
Data Source
AI summary
A method of manufacturing a flexible display device includes forming a base substrate on a first sacrificial layer formed on a first supporting substrate, forming a display device array on the base substrate, forming a second sacrificial layer on a second supporting substrate, forming a touch array on the second sacrificial layer, adhering the first supporting substrate onto the second supporting substrate using an adhesive, irradiating laser energy onto the first sacrificial layer to remove the first sacrificial layer and separate the first supporting substrate from the base substrate, and irradiating laser energy onto the second sacrificial layer to separate interfaces of the second supporting substrate and the second sacrificial layer from each other, such that the second sacrificial layer is fixed on the touch array. The second sacrificial layer includes at least one of oxidized molybdenum, lead zirconate titanate, gallium nitride, and an amorphous silicon based inorganic material.