Flexible Donor Plate Heating for Precise Deposition Alignment

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Solution Overview

Problem

Existing deposition methods face challenges in accurately controlling the lateral position of a deposition substance on a target due to deviations in the transfer direction, leading to inaccuracies in the deposition location.

Innovation Solution

A donor plate with a flexible substrate and a resistive heater layer connected via slits to electrodes, allowing for controlled deformation and precise deposition by heating, combined with independently controllable resistive heating elements for further control over the ejection process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If resistive heating is applied to induce heat for causing ejection of the filler, then the deposition process can be initiated, but lateral deviations occur in the deposition location due to difficulty in accurately controlling the transfer direction

Engineering Contradiction:
Improvedeposition location accuracyVSAvoidcontrol of transfer direction
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The donor plate is designed as a flexible substrate that can dynamically change its shape in response to thermal expansion. When resistive heating is applied, the plate deforms to bring the patterned layer into contact with the target, ensuring accurate deposition location. This dynamic adaptation eliminates lateral deviations caused by rigid misalignment.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The flexible substrate is specifically designed to undergo controlled thermal expansion when heated by the resistive heater layer. This thermal expansion causes the plate to deform and move the patterned layer toward the target, automatically compensating for positioning errors and ensuring precise deposition location without requiring complex mechanical positioning systems.

Inventive Principle:
Principle #37Thermal expansion

2Manufacturing precision

If the donor plate is made flexible to enable thermal deformation for accurate deposition, then deposition location accuracy is improved, but the structural complexity increases

Engineering Contradiction:
Improvedeposition location accuracyVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The donor plate employs a flexible substrate that can be easily fabricated using standard thin-film deposition techniques. This flexible membrane structure allows thermal deformation without requiring complex mechanical actuation systems, thereby improving deposition accuracy while keeping the overall device structure relatively simple and manufacturable.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The invention replaces complex mechanical positioning and alignment systems with a thermal field-based approach. Instead of using sophisticated mechanical stages or adjustment mechanisms to align the patterned layer, the system uses resistive heating to induce controlled thermal expansion of the flexible substrate, which automatically positions the patterned layer on the target. This substitution significantly reduces mechanical complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If the flexible substrate is heated uniformly to cause deformation, then the patterned layer moves towards the target accurately, but the heating process requires precise control to avoid overheating

Engineering Contradiction:
Improvedeposition location accuracyVSAvoidheating control stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The resistive heater layer is segmented into multiple independently controllable heating zones or elements distributed across the donor plate. This segmentation allows selective heating of specific regions to achieve uniform thermal expansion while providing fine-grained control over the heating process. Each heating element can be independently adjusted to maintain temperature within safe operating limits, preventing overheating while ensuring accurate deformation for deposition.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables accurate control of deposition location and velocity, minimizing deviations and allowing for rapid cooling to prevent adhesion to the donor plate, thereby improving printing accuracy and efficiency.

Implementation Method 1

the resistive heater layer is electrically connected to each of a contact surface of the first electrode and a contact surface of the second electrode via at least one respective slit in the first electrically insulating layer. Upon supplying electric energy to the resistive heater layer the heat developed therein

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

Upon supplying electric energy to the resistive heater layer the heat developed therein causes the flexible substrate to deform so that the patterned layer moves towards the target

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS12635079B2Donor plate, deposition device and deposition method
Publication Date: 2026.05.19 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • US12635079B2 patent drawing
  • US12635079B2 patent drawing
  • US12635079B2 patent drawing

AI summary

A donor plate for deposition of a deposition substance on a target is disclosed herein. The donor plate includes a flexible substrate, which at a first main surface of the flexible substrate has, in sequential order, further layers in the form of: an electrode layer, a first electrically insulating layer, a resistive heater layer, a second electrically insulating layer and a patterned layer provided with one or more recesses for holding deposition substance to be deposited on the target. The electrode layer comprises a first and a second electrode of a complementary shape and being electrically insulated from each other. The resistive heater layer is electrically connected to each of a contact surface of the first electrode and a contact surface of the second electrode via at least one respective slit in the first electrically insulating layer.