Flexible Foil Liner Structure for Cleaner Preclean Chambers
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Solution Overview
Problem
Preclean chambers in semiconductor processing face frequent maintenance due to redeposition of contaminants and etched materials, limiting the number of wafers that can be processed before cleaning is required, which affects the performance and longevity of the process kit.
Innovation Solution
A recyclable process kit with a flexible metallic foil liner attached to a frame, allowing specific flexibility based on the malleability of the material, which prevents redeposited particles from flaking off and contaminating the chamber, thereby extending the time between maintenance cycles.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a process kit is used to prevent deposition of contaminants onto chamber surfaces, then particle contamination is reduced, but the process kit requires periodic maintenance due to deposition buildup on the process kit itself
Solution Approach 1:
The patent applies a flexible foil liner (thin film) to the process kit shield. This foil liner can be easily removed and replaced, allowing the process kit to be maintained more frequently and quickly. The flexibility of the foil allows it to conform to the shield surface while enabling simple disposal and replacement, thus extending the overall operational life of the process kit system despite frequent maintenance cycles.
Solution Approach 2:
The patent employs a disposable foil liner that can be easily removed and replaced on the process kit shield. Instead of maintaining the entire process kit, only the inexpensive foil liner needs periodic replacement. This approach treats the foil as a consumable component, allowing frequent maintenance without significant cost or downtime, thereby extending the effective life of the process kit.
2Area of stationary object
If the foil liner is attached at multiple points, then it provides better coverage and protection, but it reduces the flexibility needed to accommodate deposition stress
Solution Approach 1:
The patent attaches the foil liner at specific discrete points rather than continuously across the entire surface. This partial attachment approach provides sufficient coverage and protection where needed while leaving the majority of the foil surface free to flex and accommodate deposition stress. The selective point attachment balances coverage requirements with flexibility needs.
3Object-affected harmful factors
If maintenance is performed frequently to prevent particle contamination, then chamber cleanliness is maintained, but productivity and throughput are reduced
Solution Approach 1:
The disposable foil liner allows for quick, inexpensive maintenance by simply removing and replacing the foil rather than performing extensive chamber cleaning. This reduces maintenance downtime and enables more frequent maintenance cycles without significantly impacting productivity, as the replacement process is rapid and cost-effective.
Solution Approach 2:
The patent extracts the maintenance burden from the entire process kit system and isolates it to just the removable foil liner. By separating the maintainable component (foil) from the permanent structure (process kit shield), maintenance can be performed quickly by removing only the foil, minimizing chamber downtime and maintaining high wafer throughput while still preventing contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly increases the number of wafers that can be processed before maintenance is needed, doubles the kit life, reduces particle contamination, and maintains uniformity, resulting in improved throughput and reduced maintenance costs.
Implementation Method 1
a foil liner composed of a metallic material that is attachable to the frame at specific points, wherein the specific points being spaced apart to produce an amount of flexibility based on a malleability of the metallic material
Implementation Method 2
the foil liner is attachable to the frame using a fiber laser with pulsing capability
Data Source
AI summary
Apparatus and methods use a unique process kit to protect a processing volume of a process chamber. The process kit includes a shield with a frame configured to be insertable into a shield and a foil liner composed of a metallic material that is attachable to the frame at specific points. The specific attachment points are spaced apart to produce an amount of flexibility based on a malleability of the metallic material. The amount of flexibility ranges from approximately 2.5 to approximately 4.5.