Flexible Fuel Assembly for Semiconductor Emission Abatement
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Solution Overview
Problem
Conventional gas abatement systems in semiconductor processes are inefficient due to their reliance on a single fuel type and high fuel consumption, lacking the ability to switch energy sources and effectively manage hazardous emissions.
Innovation Solution
A flexible fuel assembly system that includes multiple fuel sources and mass flow controllers to dynamically transmit and control the flow of fuels like methane and hydrogen through a combustion chamber, catalyzing reactions to abate emissions from semiconductor processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single fuel type is used in conventional abatement systems, then the system structure is simple, but the adaptability to different fuel sources and energy consumption optimization is limited
Solution Approach 1:
The fuel assembly is designed to accommodate multiple fuel types (natural gas, propane, hydrogen, etc.) through a universal interface that accepts different fuel sources. The system includes multiple fuel sources with respective mass flow controllers that can all connect to and operate with the combustion chamber, enabling one system to perform multiple fuel-related functions and adapt to different energy sources without requiring separate dedicated systems for each fuel type.
Solution Approach 2:
The system incorporates dynamic switching capability between different fuel sources through controllable valves and mass flow controllers. The controller can dynamically adjust which fuel source is active and at what flow rate, allowing the system to adapt its fuel input in real-time based on availability, cost, or operational requirements. This dynamic control enables flexible operation while maintaining a relatively stable combustion process.
2Productivity
If conventional abatement systems use fixed fuel configuration, then the device complexity is low, but the productivity and fuel efficiency are reduced due to inability to optimize fuel consumption
Solution Approach 1:
The system incorporates feedback control through mass flow controllers that monitor and adjust fuel flow rates based on combustion requirements. The controller receives signals about fuel consumption patterns and emission treatment effectiveness, then adjusts the fuel delivery from different sources accordingly. This feedback mechanism enables continuous optimization of fuel efficiency while maintaining proper combustion stoichiometry and emission abatement performance.
Solution Approach 2:
The system optimizes fuel efficiency by dynamically changing operational parameters such as fuel flow rates, fuel mixture ratios, and combustion air supply. Different fuel sources have different heating values and combustion characteristics, so the system adjusts parameters like flow rate and mixture ratio for each fuel type to achieve optimal combustion efficiency. This parameter optimization maximizes productivity and fuel efficiency across different operating conditions.
3Loss of energy
If the system cannot switch between fuel sources, then the operation is simple, but the loss of energy increases due to inability to utilize alternative fuel sources
Solution Approach 1:
The system recovers and utilizes fuel from various sources including natural gas, propane, and hydrogen, preventing energy waste by capturing fuel that would otherwise be lost or unused. The mass flow controllers ensure that fuel is efficiently delivered and combusted, maximizing energy recovery. This approach minimizes energy loss by ensuring that available fuel sources are fully utilized rather than discarded, thereby reducing overall fuel consumption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances fuel efficiency, sustainability, and emission abatement by allowing the system to alternate between fuels and recover hydrogen from emissions, dynamically responding to consumption demands and increasing the availability of fuels for combustion reactions.
Implementation Method 1
a combustion chamber configured to abate an emission output from a first semiconductor process
Implementation Method 2
transmit fuel through the combustion chamber which catalyzes a combustion reaction to abate the emission therein
Data Source
AI summary
A system to abate an emission from a first semiconductor process is disclosed. The system includes an abatement apparatus, such as a gas scrubber, to remove hazardous and toxic gas species from the emission. The abatement apparatus may combust the emission to remove these gas species using a fuel and oxidant. The system includes a fuel assembly fluidly coupled to the abatement apparatus which transmits the fuel from at least one source through the abatement apparatus. The fuel assembly may include a supply tank which contains a volume of fuel, a recovery apparatus which recovers and contains a recovery volume of fuel from a second semiconductor process, and a mass flow controller which may transmit fuel from at least one of the supply tank and the recovery apparatus through the abatement apparatus.