Flexible Heater Package with Dual Barrier Layers
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Solution Overview
Problem
Flexible heaters are prone to damage from moisture and oxygen, and existing packaging technologies fail to effectively prevent this damage while maintaining stress balance and preventing warping, which affects the reliability and lifespan of the heater package.
Innovation Solution
A heater package design that includes a substrate, a first barrier layer with a treatment layer on one side, and a second barrier layer covering the heater's upper and sidewalls, with both barrier layers having specific composition and thickness ratios to enhance moisture and oxygen barrier properties and achieve stress balance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional packaging is used for flexible heaters, then the heater is exposed to moisture and oxygen, but the heater structure remains simple without additional barrier layers
Solution Approach 1:
The patent implements nested barrier layers where a first barrier layer is formed on the substrate and a second barrier layer is formed on the first barrier layer, creating a multi-layer protective structure. Each barrier layer contains treatment layers that provide moisture and oxygen barrier functions, effectively protecting the heater while organizing the protective structure in a nested configuration that minimizes overall complexity
Solution Approach 2:
The patent uses composite barrier layers combining organic materials (such as polysilazane or polysiloxazane) with inorganic treatment layers (such as silicon nitride or silicon oxynitride). This composite structure provides superior moisture and oxygen barrier properties compared to single-material layers, improving reliability while the controlled thickness ratios maintain manageable structural complexity
2Reliability
If thick barrier layers are used to protect against moisture and oxygen, then barrier capability increases, but stress balance is disrupted causing warping
Solution Approach 1:
The patent precisely controls the thickness parameters of treatment layers within barrier layers, specifying that treatment layers constitute 5-50% (preferably 10-30%) of the total barrier layer thickness. This parameter optimization provides sufficient barrier capability while limiting stress accumulation that would cause warping, maintaining stress balance in the heater package
Solution Approach 2:
The patent applies treatment layers at specific locations within barrier layers rather than using uniformly thick barriers throughout. The treatment layers are positioned to provide enhanced barrier capability at critical interfaces while maintaining overall stress balance, creating local quality variations that optimize both protection and structural stability
3Reliability
If treatment layers are added to barrier layers to enhance barrier properties, then moisture and oxygen protection improves, but manufacturing complexity increases
Solution Approach 1:
The patent forms treatment layers within barrier layers during the packaging manufacturing process itself, rather than requiring separate post-processing steps. The treatment layers are deposited concurrently with or during the formation of barrier layers, integrating the barrier enhancement into the existing manufacturing workflow and minimizing additional manufacturing complexity
Solution Approach 2:
The treatment layers serve multiple functions simultaneously: they provide moisture barrier properties, oxygen barrier properties, and stress management capabilities within the same structural element. This multi-functionality reduces the need for separate dedicated layers for each function, simplifying the overall manufacturing process while enhancing barrier performance
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively protects the heater from moisture and oxygen, maintains stress balance, and prolongs the heater package's lifespan by using polysilazane or polysiloxazane materials with surface treatments to create silicon nitride or silicon oxynitride layers with enhanced barrier properties.
Implementation Method 1
using polysililazane or polysiloxazane materials with surface treatments to create silicon nitride or silicon oxynitride layers with enhanced barrier properties
Data Source
AI summary
An embodiment of the disclosure provides a heater package including a substrate, a first barrier layer, at least one heater, and a second barrier layer. The first barrier layer is disposed on a surface of the substrate and has a first treatment layer on a side away from the substrate. The heater is disposed on the substrate and includes a heating layer and at least one electrode. The at least one electrode and the heating layer contact with each other. The second barrier layer covers an upper surface and a sidewall of the heater and has a second treatment layer on an opposite side or the side away from the substrate. A ratio of a thickness of the first treatment layer to a thickness of the first barrier layer and a ratio of a thickness of the second treatment layer to a thickness of the second barrier layer range from 0.03 to 0.2.