Flexible Holding Arrangement for Substrate Release

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Solution Overview

Problem

Conventional substrate support systems cause bulging in substrates during deposition processes, leading to increased risk of breakage and challenges in releasing thin, large-area substrates without damage.

Innovation Solution

A holding arrangement with a flexible body and adhesive system that applies force to induce bending, allowing for shear forces to detach the substrate safely, utilizing a pneumatic or mechanically actuated force transmission arrangement to deform the flexible wall and release the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional support systems are used to hold substrates during deposition, then substrates can be supported during processing, but bulging occurs on the substrate due to forces pushing the substrate edge towards the center

Engineering Contradiction:

Improvesubstrate stability during processingVSAvoidsubstrate flatness

Core Design Contradiction:

ReliabilityVSShape

Solution Approach 1:

The patent employs a flexible membrane as the holding arrangement that can adapt to substrate shape changes during processing. The membrane's flexibility allows it to conform to bulging without exerting corrective forces that would cause breakage, while still providing secure holding during deposition processes.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The patent changes the mechanical parameters of the holding arrangement by using a compliant, elastic material instead of rigid supports. This allows the holding arrangement to dynamically adjust its support characteristics during processing, accommodating substrate deformation without causing damage.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If conventional rigid support systems are used, then substrates are securely held, but releasing thin large area substrates without bulging or damaging is challenging

Engineering Contradiction:

Improvesubstrate holding securityVSAvoidsubstrate release difficulty

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The patent transitions from static rigid supports to a dynamic flexible membrane system that can change its mechanical properties during the holding and release cycles. The membrane can be tensioned for secure holding during processing, then relaxed or deformed to facilitate easy release of the substrate without damage.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent prepares the flexible membrane in advance to accommodate the specific substrate geometry and processing requirements. The membrane can be pre-formed or pre-positioned to match the substrate contours, ensuring optimal holding during processing and facilitating smooth release afterward.

Inventive Principle:

Principle #10Preliminary action

3Ease of operation

If flexible material is used for the holding arrangement body, then the first wall can be bent to release the substrate, but the structure becomes less rigid

Engineering Contradiction:

Improvesubstrate release easeVSAvoidstructural rigidity

Core Design Contradiction:

Ease of operationVSStrength

Solution Approach 1:

The patent utilizes a flexible membrane made of elastomeric or polymeric material that provides sufficient structural integrity for holding substrates during processing while allowing controlled deformation for release. The material selection balances flexibility for release operations with adequate strength for secure holding.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The patent may employ composite structures combining flexible membrane materials with reinforcing elements or layers that provide necessary structural strength during holding operations while permitting controlled bending during release. The composite design optimizes both rigidity and flexibility requirements.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively reduces the risk of substrate damage during release by inducing shear forces at the adhesive interface, ensuring secure attachment and detachment without bulging or breakage.

Implementation Method 1

an adhesive arrangement configured for attaching the substrate, wherein the adhesive arrangement is provided on a first side of the first wall

Methodology Applied

Scientific EffectAdhesive bonding: Adhesive

Implementation Method 2

a force transmission arrangement configured for applying a force to a second side of the first wall opposing the first side of the first wall

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Implementation Method 3

applying a force to the second side of the first wall such that a bending of the first wall of the body is provided

Methodology Applied

Scientific EffectShear force: Shear Stress

Data Source

PatentUS11186906B2Holding arrangement for holding a substrate, carrier including the holding arrangement, processing system employing the carrier, and method for releasing a substrate from a holding arrangement

Publication Date: 2021.11.30 APPLIED MATERIALS INC

AI summary

A holding arrangement for holding a substrate is described. The holding arrangement includes a body having a first wall of flexible material; an adhesive arrangement configured for attaching the substrate, wherein the adhesive arrangement is provided on a first side of the first wall, and a force transmission arrangement configured for applying a force to a second side of the first wall opposing the first side of the first wall.