Flexible Leak Sensor with Litmus Film for Chemical Identification

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Solution Overview

Problem

Conventional leak sensors in semiconductor processing equipment are ineffective in detecting chemical leaks in utility pipes and identifying the type of chemical leaked, leading to accidents and prolonged downtime due to their inability to sense minute leaks and provide accurate chemical identification.

Innovation Solution

A leak sensor system incorporating litmus paper wrapped around pipes to visually indicate chemical leaks and short-circuiting wires to electrically signal leak occurrences, connected to a control box for alarm generation and quick operator response.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a point-type leak sensor is used to detect chemical leaks, then the sensor can be installed in semiconductor apparatus or valve box, but it is unable to sense utility pipe leaks and cannot identify the type of chemical leaked

Engineering Contradiction:
Improveleak detection capabilityVSAvoidapplication scope
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The leak sensor is designed with multiple sensing elements including pH-sensitive, oxidizing agent-sensitive, and reducing agent-sensitive components that can detect various types of chemicals. The sensor can be applied to both semiconductor apparatus and utility pipes, making it universally applicable across different locations and chemical types.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The sensor incorporates separate sensing elements for different chemical properties (pH, oxidizing agents, reducing agents) rather than a single sensing mechanism. This segmentation allows the sensor to identify specific chemical types by responding to different sensing elements, enabling chemical identification capability.

Inventive Principle:
Principle #1Segmentation

2Reliability

If conventional leak sensors are installed in semiconductor apparatus or valve box, then they can detect leaks at those locations, but they are unable to detect leaks in utility pipes

Engineering Contradiction:
Improveleak detection accuracyVSAvoidinstallation flexibility
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The sensor utilizes a flexible film structure that can be wrapped around utility pipes of various diameters and shapes. This flexible film design allows the sensor to conform to different pipe geometries, enabling easy installation on utility pipes without requiring rigid mounting structures or complex adaptation mechanisms.

Inventive Principle:
Principle #30Flexible shells and thin films

3Device complexity

If a light-emitting point-type sensor is used to detect leakage, then the sensor structure is simple, but the emitted light may be absorbed by the leakage reducing the reflected light intensity

Engineering Contradiction:
Improvesensor structureVSAvoidleakage detection sensitivity
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The sensor uses chemical reaction intermediaries (pH indicators, oxidizing/reducing agent indicators) embedded in the flexible film as mediators between the leaked chemicals and the detection system. These intermediators change color or generate electrical signals when reacting with specific chemicals, providing indirect but highly sensitive detection that avoids the light absorption problem of direct optical sensing.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables early detection and identification of chemical leaks, reducing accidents and downtime by providing visual and audible alerts, allowing operators to take prompt action and preventing exposure to hazardous chemicals.

Implementation Method 1

A leak sensor may include a film that is capable of visually indicating the presence of a fluid that is leaked from a pipe

Methodology Applied
Scientific EffectColor change: Thermochromism

Implementation Method 2

The wires are preferably configured to be short-circuited by contact with the fluid leaked from the pipe

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS7398676B2Leak sensor and leak sensing system
Publication Date: 2008.07.15 SAMSUNG ELECTRONICS CO LTD
  • US7398676B2 patent drawing
  • US7398676B2 patent drawing
  • US7398676B2 patent drawing

AI summary

A leak sensor and a leak sensing system are provided. The leak sensor preferably includes a fluid sensing member that is capable of sensing and indicating the presence of a fluid leaked from a fluid storage or transport member. The leak sensor further preferably includes at least two wires communicating with the fluid sensing member. The wires are preferably configured to be short-circuited when they contact the fluid leaked from the fluid storage or transport member. An electrical signal corresponding to a leak sensor location can thereby be sent to a control terminal of the leak sensing system. A portion of the wires may be arranged in a cable coated with a protective material such as TeflonĀ®. The control box (or terminal) preferably receives electrical signals from a plurality of leak sensors. The electrical signals can provide information on whether the fluid has leaked and on which leak sensor or sensors have detected the fluid leak.