Flexible Manifold Extension Blocks for Semiconductor Gas Panels

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Solution Overview

Problem

Conventional semiconductor etch processing systems face contamination issues due to particle deposition from gas sticks and exposure during maintenance, and are costly and inefficient in adding or removing gas sticks, leading to unnecessary components and 'dead-leg' contamination.

Innovation Solution

A flexible gas delivery apparatus with extension blocks that allow for efficient addition or removal of single gas sticks to existing gas panels, reducing contamination risks and material usage by creating a modular system with removably interconnected manifold blocks and vertical tube ports for fluid communication.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If gas sticks are down mounted on multiple manifold blocks and onto a base plate, then particle contamination is reduced, but manufacturing cost increases due to highly machined parts

Engineering Contradiction:

Improveparticle contaminationVSAvoidmanufacturing cost

Core Design Contradiction:

Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The gas delivery system is divided into modular components: a base plate with integrated manifold blocks, where each manifold block contains internal passages and mounting features. This segmentation allows the system to maintain clean, integrated gas flow paths (reducing contamination) while enabling individual components to be manufactured separately with less complex machining operations (reducing cost).

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Multiple manifold blocks are merged into a single integrated assembly that is mounted onto the base plate as one unit. The manifold blocks are interconnected with internal passages that provide continuous gas flow paths, eliminating the need for external tubing and couplers. This merging reduces particle contamination sources while the modular nature allows cost-effective manufacturing of individual blocks.

Inventive Principle:

Principle #5Merging (Combining)

2Adaptability or versatility

If a complete gas panel is replaced to add or remove gas sticks, then system configuration is updated, but time and productivity are lost due to complete replacement requirement

Engineering Contradiction:

Improvesystem configuration flexibilityVSAvoidtime for adding/removing gas sticks

Core Design Contradiction:

Adaptability or versatilityVSProductivity

Solution Approach 1:

The gas panel is segmented into independent gas stick positions, each with its own manifold block and mounting features on the base plate. This allows individual gas sticks to be added, removed, or configured independently without affecting other positions, enabling rapid system reconfiguration without complete panel replacement.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system is designed with dynamic configurability, where gas sticks can be easily installed or removed from specific positions on the base plate. The manifold blocks include integrated mounting features that facilitate quick connection and disconnection, allowing the system to adapt to changing requirements without downtime for complete replacement.

Inventive Principle:

Principle #15Dynamics

3Ease of manufacture

If minimum number of gas sticks (6 or 9) is manufactured, then manufacturing cost is reduced, but adaptability is limited as users cannot add or remove sticks

Engineering Contradiction:

Improvemanufacturing costVSAvoidnumber of gas sticks

Core Design Contradiction:

Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The base plate is designed with multiple discrete mounting positions for manifold blocks, each position being independently configurable. This segmentation allows manufacturers to produce base plates with a minimum number of positions (reducing cost) while enabling users to add or remove manifold blocks at specific positions to achieve the required number of gas sticks (increasing adaptability).

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The base plate is designed as a universal platform that can accommodate different numbers of gas sticks through the selective addition or removal of manifold blocks. The standardized mounting features and internal passages allow the same base plate to serve multiple configurations, making it multi-functional and adaptable to various user needs without requiring different base plate designs.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS8122910B2Flexible manifold for integrated gas system gas panels

Publication Date: 2012.02.28 LAM RES CORP

AI summary

A flexible gas delivery apparatus having a gas panel with a first extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with a pump/purge manifold, and a second extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with a mixing manifold, wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.