Flexible Membrane Ejection Apparatus Damage Detection

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Solution Overview

Problem

Existing ejection apparatuses require a certain amount of ejection material to enter a secondary storage space to detect damage in the flexible membrane, leading to delayed detection of damage, which hampers timely intervention.

Innovation Solution

Incorporating a detector that senses changes in the electrical properties of the flexible membrane due to the entry of either the ejection material or the operating liquid, allowing for quick detection of membrane damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a flexible membrane is used to separate storing spaces and detect damage by detecting change in physical property of liquid, then the ejection material and operating liquid can be stored separately, but it takes time to detect damage after occurrence because a certain amount of ejection material must enter the second storing space

Engineering Contradiction:
Improvedamage detection capabilityVSAvoiddetection time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent replaces the mechanical/physical detection method (detecting change in physical property of liquid after it has entered the second storing space) with an electrical detection method. A detector is integrated into the flexible membrane to directly sense electrical property changes (such as capacitance or resistance) when the membrane is damaged, eliminating the need for ejection material to enter the second storing space and significantly reducing detection time.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The detector is pre-installed within the flexible membrane structure, ready to immediately detect electrical property changes upon damage occurrence. This preliminary positioning of the detection mechanism allows for immediate detection without requiring any additional material transfer or time delay, as the detector is already in place to sense the moment of membrane failure.

Inventive Principle:
Principle #10Preliminary action

2Ease of operation

If the internal pressure of the second storing space is controlled to indirectly adjust the internal pressure of the first storing space, then the ejection material can be supplied to the ejection head, but the ejection material may enter the second storing portion upon flexible member damage

Engineering Contradiction:
Improvepressure control for material supplyVSAvoidcontamination of ejection material
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The detector provides real-time feedback on the integrity of the flexible membrane by detecting electrical property changes. When damage occurs, the detector immediately signals the control system, which can then stop the pressure control operation to prevent ejection material from entering the second storing space. This feedback mechanism allows the system to maintain pressure control for proper material supply while preventing contamination upon damage detection.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid detection and handling of flexible membrane damage, thereby preventing further contamination and ensuring uninterrupted operation of the ejection apparatus and imprinting processes.

Implementation Method 1

a flexible membrane (16) that separates an internal space into a first storing space (31) and a second storing space (32)

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

a detector (43) that detects a change in electrical property of the flexible membrane (16) resulting from entry of at least one of the ejection material (2) and the operating liquid (17) to inside of the flexible membrane (16)

Methodology Applied
Scientific EffectElectrical property change detection: Electrical Resistance

Implementation Method 3

a pressure controller (12) that controls internal pressure of the second storing space (32)

Methodology Applied
Scientific EffectPressure control: Pressure Increase

Data Source

PatentUS10987840B2Ejection-material ejection apparatus and imprinting apparatus
Publication Date: 2021.04.27 CANON KK
  • US10987840B2 patent drawing
  • US10987840B2 patent drawing
  • US10987840B2 patent drawing

AI summary

The internal space of a storing container is separated by a flexible membrane into a first storing space storing an ejection material and a second storing space storing an operating liquid. A change in electrical property of the flexible membrane resulting from entry of at least one of the ejection material and the operating liquid to the inside of the flexible membrane is detected.