Flexible Oxygen-Deficient Metal Oxide Sensor for Room-Temperature Gas Detection

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Solution Overview

Problem

Current flexible and stretchable sensors face limitations in detecting hazardous gases and electromagnetic radiation, particularly at low concentrations and in wearable electronic devices, due to the need for elevated temperatures and rigid substrates, which restrict their sensitivity and adaptability.

Innovation Solution

A flexible or stretchable sensor is developed using a substrate with oxygen-deficient metal oxide layers, such as zinc oxide, that can flex and stretch, integrated with a polymer isolation layer and terminal electrodes, allowing for detection of substances and electromagnetic radiation at room temperature with enhanced sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If flexible or stretchable substrates are used for sensors, then adaptability and flexibility are improved, but manufacturing precision and structural stability deteriorate

Engineering Contradiction:
ImproveflexibilityVSAvoidstructural stability
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The sensing element is divided into multiple discrete sensing regions or pixels distributed across the flexible substrate. This segmentation allows the sensor to maintain structural integrity while accommodating substrate deformation, as each segment can independently respond to local conditions without compromising the entire sensor array.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The sensor design incorporates dynamic elements that can adapt to substrate deformation. The electrical connection structure includes flexible conductors and compliant interconnects that maintain electrical continuity during stretching or bending, allowing the sensor to dynamically adjust to mechanical stress while preserving measurement accuracy.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If rigid substrates are used for sensors, then structural stability and manufacturing precision are improved, but adaptability and flexibility deteriorate

Engineering Contradiction:
Improvestructural stabilityVSAvoidflexibility
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The invention employs thin-film sensing elements deposited on flexible substrates, replacing traditional rigid bulk structures. These thin films maintain sufficient mechanical stability for precise manufacturing while conforming to flexible substrate geometries, enabling both structural precision and substrate adaptability.

Inventive Principle:
Principle #30Flexible shells and thin films

3Measurement precision

If elevated temperatures are used for gas detection, then detection sensitivity is improved, but energy consumption and device complexity increase

Engineering Contradiction:
Improvedetection sensitivityVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The sensing mechanism transitions from thermal-based detection to electrical-field-based detection. By changing the detection parameter from temperature-dependent thermal effects to room-temperature electrical measurements, the sensor achieves comparable or superior detection sensitivity without the high energy consumption associated with heated sensing elements.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the mechanical/thermal heating system with an electrical measurement system. Instead of physically heating the sensing element to enhance gas interaction, the sensor uses electrical field effects at room temperature to achieve sensitive detection, eliminating the need for complex thermal management and reducing energy consumption.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor demonstrates superior sensitivity and stability in detecting gases like hydrogen and nitrogen dioxide, as well as ultra-violet radiation, outperforming rigid counterparts and enabling applications in hazardous environments and wearable electronics.

Implementation Method 1

an electrical signal is generated that is proportional to a resistance value corresponding to a sensing of the substance and/or electromagnetic radiation impinging on the sensing element

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

a sensing element applied to the flexible substrate, between and in electrical contact with the pair of terminal electrodes, wherein the sensing element is responsive to a substance and/or electromagnetic radiation impinging thereon

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS9976952B2Flexible or stretchable sensor for use in detecting a substance and/or electromagnetic radiation, and a method for detecting thereof
Publication Date: 2018.05.22 RMIT UNIVERSITY
  • US9976952B2 patent drawing
  • US9976952B2 patent drawing
  • US9976952B2 patent drawing

AI summary

In general, this disclosure is directed to a flexible or stretchable sensor and a method of detecting a substance and/or electromagnetic radiation using said sensor. The sensor comprises a flexible or stretchable substrate, a pair of terminal electrodes disposed on the flexible or stretchable substrate in mutually spaced apart and opposing relation, and a sensing element applied to the flexible or stretchable substrate, between and in electrical contact with the pair of terminal electrodes, wherein the sensing element is responsive to a substance and/or electromagnetic radiation impinging thereon, and wherein when a voltage is applied across the sensor, an electrical signal is generated that is proportional to a resistance value corresponding to a sensing of the substance and/or electromagnetic radiation impinging on the sensing element.