Flexible Microelectrode Arrays with PDMS-CNT Channels for Curved Surfaces

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Solution Overview

Problem

Existing microelectrode arrays (MEAs) are expensive and lack flexibility, limiting their applicability to curved surfaces due to the use of hard substrates like silicon or glass and traditional microfabrication processes.

Innovation Solution

The development of flexible MEA systems using a flexible substrate such as polydimethylsiloxane (PDMS) with patterned wells and channels filled with a conductive material like a mixture of PDMS and carbon nanotubes, manufactured through soft lithography techniques.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional silicon or glass substrates are used for MEA manufacturing, then manufacturing precision and structural stability are improved, but flexibility and adaptability to curved surfaces deteriorate

Engineering Contradiction:
Improvemicroelectrode array manufacturing precisionVSAvoidadaptability to curved surfaces
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces rigid silicon or glass substrates with flexible polymer substrates such as polyimide, polyethylene terephthalate (PET), or polydimethylsiloxane (PDMS). These flexible substrates can be conformally mounted on curved surfaces like the animal brain while maintaining the microelectrode array functionality through soft lithography fabrication processes

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent changes the material parameters from rigid to flexible by selecting appropriate polymer substrates and controlling their mechanical properties. The substrate flexibility is optimized to balance with the electrode array requirements, enabling conformal mounting on curved surfaces while maintaining electrical performance

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If traditional silicon or glass substrates with hard microfabrication processes are used, then manufacturing precision is improved, but manufacturing cost increases

Engineering Contradiction:
Improvemicroelectrode array manufacturing precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent replaces traditional hard silicon-based microfabrication processes with soft lithography techniques using polymer substrates. This substitution enables lower-cost manufacturing while maintaining precision through alternative fabrication methods that are more accessible and less expensive than conventional semiconductor manufacturing

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs inexpensive polymer substrates that can be easily fabricated and disposed of, replacing expensive silicon wafers. The flexible substrate approach allows for cost-effective production where the substrates can be manufactured through simpler, less costly processes

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Adaptability or versatility

If flexible substrate materials are used for MEA manufacturing, then flexibility and adaptability to curved surfaces are improved, but manufacturing precision may deteriorate

Engineering Contradiction:
ImproveflexibilityVSAvoidmicroelectrode array manufacturing precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent uses flexible polymer substrates combined with soft lithography techniques that are specifically designed to maintain precision despite material flexibility. The soft lithography process enables precise pattern transfer onto the flexible substrate, ensuring that microelectrode dimensions and spacing meet required specifications

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The patent optimizes the physical and chemical parameters of the flexible substrate to balance flexibility with manufacturing precision. By selecting appropriate polymer materials and controlling their mechanical properties, the substrate can be flexible enough for curved surfaces while maintaining dimensional stability during fabrication

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The flexible MEA systems are more cost-effective and adaptable to curved surfaces, enhancing their applicability and functionality.

Implementation Method 1

The wells and channels are filled with a conductive flexible material such as a mixture of PDMS and carbon nanotubes (CNTs) to form sets of microelectrodes, microelectrode leads, and contact pads therein

Methodology Applied
Scientific EffectCarbon nanotubes: Carbon Nanotubes

Data Source

PatentUS20250213160A1Flexible Microelectrode Arrays
Publication Date: 2025.07.03 NIKON CORP
  • US20250213160A1 patent drawing
  • US20250213160A1 patent drawing
  • US20250213160A1 patent drawing

AI summary

The problems of high costs and lack of flexibility in microelectrode arrays (MEAs) is addressed by the inexpensive flexible MEA systems and methods for manufacturing them presented herein. The MEA systems described herein are generally formed from a flexible substrate such as polydimethylsiloxane (PDMS). The flexible substrate generally comprises a series of wells and channels patterned therein. The wells and channels are filled with a conductive flexible material such as a mixture of PDMS and carbon nanotubes (CNTs) to form sets of microelectrodes, microelectrode leads, and contact pads therein. The resulting MEA systems may be substantially more flexible and less expensive than prior MEA systems. The MEA systems presented herein may be manufactured using a variety of soft lithography techniques described herein.