Flexible Mode Scanning Optical Microscopy with NA Allocation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional oblique incidence dark-field microscopy systems require separate components for illumination and collection, limiting numerical aperture (NA) and resolution due to fixed positions, which restricts flexibility in inspecting samples with varying characteristics.
Innovation Solution
A system utilizing an input mask to shape a beam that passes through an objective lens for both focusing and collecting reflected and scattered light, allowing a single objective lens to perform both functions, with a bright-field and dark-field detector module to capture signals from the sample, enabling flexible inspection by varying the allocation of NA between illumination and collection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate components are used for illumination and collection in conventional oblique incidence dark-field microscopy, then the system can achieve dark-field imaging, but the numerical aperture is limited and resolution is reduced due to fixed component positions
Solution Approach 1:
The patent combines illumination and collection functions into a single objective lens by using different angular regions of the same lens for different purposes. The illumination light passes through the central region of the objective lens, while scattered light is collected through outer regions, allowing both functions to be performed by one component rather than requiring separate lenses arranged in fixed positions.
Solution Approach 2:
The patent segments the objective lens aperture into different angular regions, with the central region dedicated to illumination and outer regions dedicated to collection. This segmentation allows the single lens to simultaneously perform multiple functions with optimized performance for each function, increasing the effective numerical aperture available for both illumination and collection.
2Adaptability or versatility
If fixed position components are used for illumination and collection, then the system structure is simplified, but flexibility in allocating numerical aperture between illumination and collection is restricted
Solution Approach 1:
The patent introduces dynamic control through a spatial light modulator (SLM) that can programmatically adjust the illumination pattern and angular distribution of light. This allows the system to dynamically reallocate numerical aperture between illumination and collection functions by modifying the illumination wavefront, providing flexibility without requiring physical reconfiguration of components.
Solution Approach 2:
The patent changes the angular parameter distribution of illumination light using the SLM to optimize performance. By controlling the illumination angles and distribution dynamically, the system can adjust the effective numerical aperture allocated to illumination versus collection based on the specific inspection requirements, maintaining ease of operation while achieving high adaptability.
3Area of stationary object
If the illumination aperture is positioned close to the objective lens, then the system structure is compact, but scattered light collection is limited because collection space is restricted to specific regions
Solution Approach 1:
The patent transitions from a planar arrangement where collection space is limited to specific regions to a three-dimensional angular space utilization. By collecting scattered light through multiple angular regions of the objective lens (outer regions at different angles), the system effectively increases the collection space without requiring additional physical volume or complex optical paths. The angular dimension provides additional space for light collection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances flexibility and resolution in optical microscopy by allowing for adjustable NA allocation and improved detection of small defects, enabling both bright-field and dark-field imaging with increased sensitivity and precision.
Implementation Method 1
an input mask that allows a shaped beam to pass through part of an objective lens where it is focused on a sample. A beam that is reflected from the sample passes through part of the objective lens and is directed to a bright-field detector. A portion of the scattered light that passes through other parts of the objective lens is directed to a dark-field detector
Implementation Method 2
a shaped beam to pass through part of an objective lens where it is focused on a sample
Implementation Method 3
A beam that is reflected from the sample passes through part of the objective lens
Implementation Method 4
an input mask that allows a shaped beam to pass through part of an objective lens
Implementation Method 5
A portion of the scattered light that passes through other parts of the objective lens is directed to a dark-field detector
Data Source
AI summary
A method for flexible inspection of a sample includes forming an input beam using a beam source, blocking a portion of the input beam using an input mask, and forming a shaped beam from a portion of the input beam. The shaped beam is received at a first portion of an objective lens and focused onto a sample. A reflected beam is collected at a second portion of the objective lens. Scattered light is collected at the first and second portions of the objective lens and at a third portion of the objective lens. The scattered light is received at a dark-field detector module and a portion of the scattered light is directed to a dark-field detector. The dark-field detector module includes an output mask having one or more output apertures that allow at least part of the scattered light that passes through the third portion of the object lens to pass as the portion of the scattered light that is directed to the dark-field detector.