Flexible Peeling Region Mold for Imprint Release
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Solution Overview
Problem
In the context of inkjet-based adaptive planarization (TAP), the large area for one-time imprinting requires a significant force for mold release, making it difficult to separate the mold from the imprinting material on the substrate without causing damage.
Innovation Solution
A mold with a higher flexibility in the peeling region near the outer periphery, achieved by providing grooves that allow for smooth release by applying a force using a lift pin or gas, reducing damage and extending the mold's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a flat plate mold with large area is used for TAP imprinting, then the area for one-time imprinting is increased, but the force required for releasing the mold becomes large making smooth separation difficult
Solution Approach 1:
The mold is divided into a peeling region near the outer periphery with higher flexibility and other portions with lower flexibility. This segmentation allows the peeling region to deform more easily under release force, enabling smooth separation while maintaining the large overall imprinting area.
Solution Approach 2:
The mold has non-uniform flexibility distribution: the peeling region near the outer periphery has higher flexibility while the central region maintains lower flexibility for structural stability. This local quality differentiation allows the mold to withstand large release forces while enabling smooth separation at the peeling region.
2Productivity
If a large area mold is used for TAP, then productivity is improved, but the mold structure becomes more complex to achieve smooth release
Solution Approach 1:
The mold structure is segmented into regions with different flexibility characteristics, allowing the large area mold to maintain structural integrity while enabling smooth release through the flexible peeling region.
Solution Approach 2:
The mold transitions from a rigid flat plate to a structure with dynamic flexibility characteristics, where the peeling region can deform dynamically during the release process to facilitate smooth separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The mold can be released smoothly and efficiently, reducing damage and improving the yield of high-quality articles by increasing the flexibility of the peeling region and distributing the release force effectively.
Implementation Method 1
a flexibility of the peeling region of the mold is higher than that of other portions near the outer periphery of the mold
Data Source
AI summary
To perform efficient releasing even if a force applied to the mold is reduced, provided is a mold which is used in an imprinting apparatus, for molding an imprinting material by imprinting the imprinting material on a substrate with an imprinting surface of the mold, and is released by applying a force in a releasing direction to a peeling region near an outer periphery of the mold, wherein a flexibility of the peeling region of the mold is higher than that of other portions near the outer periphery of the mold.