Flexible Active Species Generator Plasma-Resistant Layer
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Solution Overview
Problem
Flexible active species generators face challenges with insulator deformation and decomposition due to plasma, leading to reduced durability and safety, especially when used in applications like medical devices and food packaging, where thermal sterilization is not applicable.
Innovation Solution
A flexible active species generator is designed with a plasma-resistant functional layer between the dielectric layer and the second electrode, using materials like AlxOy, SiOx, and oxides to prevent physical or chemical changes, along with a self-cleaning, super water-repellent, and light-emitting functionality, enabling efficient generation of active species while maintaining insulator integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a flexible active species generator uses a polymer insulator, then it achieves flexibility and ease of manufacture, but the insulator deforms and decomposes due to plasma exposure, reducing durability and safety
Solution Approach 1:
The patent applies composite materials by combining a polymer insulator with a plasma-resistant functional layer. The polymer provides flexibility and ease of manufacture, while the functional layer (made of materials like Al2O3, SiO2, or SiOxCyHz) protects against plasma decomposition. This composite structure resolves the contradiction by integrating the advantages of both materials: the polymer's processability and the inorganic layer's plasma resistance.
Solution Approach 2:
The plasma-resistant functional layer acts as an intermediary between the polymer insulator and the plasma environment. It serves as a protective barrier that prevents direct interaction between the plasma and the polymer, thereby preventing deformation and decomposition while allowing the polymer to maintain its flexibility and manufacturing advantages.
2Reliability
If thermal sterilization is applied to flexible materials, then sterilization effectiveness is achieved, but the materials show degeneration and distortion due to high temperature
Solution Approach 1:
The patent replaces thermal sterilization with plasma sterilization. Instead of using high-temperature thermal energy that causes polymer degradation, the invention uses cold plasma (atmospheric pressure plasma) that generates active species for sterilization without significant heat generation. This substitution allows effective sterilization while maintaining the integrity and flexibility of the polymer material.
3Productivity
If the insulator is exposed to plasma for continuous operation, then active species generation function is maintained, but decomposition occurs generating harmful components
Solution Approach 1:
The patent converts the harmful effect of plasma on the insulator into a beneficial protective function. The plasma-resistant functional layer is specifically designed to withstand plasma exposure without decomposing, thereby protecting the polymer insulator from plasma-induced degradation. This layer transforms the potentially harmful plasma environment into a controllable condition that enables continuous operation without generating harmful decomposition products.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the durability and safety of the flexible active species generator by preventing insulator deformation and decomposition, improving operational stability and efficiency in generating active species, and providing additional functions like self-cleaning and water repellency.
Implementation Method 1
a plasma resistant functional layer formed between the dielectric layer and the second electrode... preventing deformation and decomposition of an insulator to improve durability and safety in addition to an active species generating function from atmospheric pressure plasma
Implementation Method 2
generate active species using atmospheric pressure low-temperature plasma... atmospheric pressure plasma to generate active species
Data Source
AI summary
The disclosure relates to a flexible active species generator comprising: a first electrode of a conductive metal thin film; a second electrode of a ground electrode; a flexible dielectric layer of an insulator formed between the first electrode and the second electrode; and a plasma resistant functional layer formed between the dielectric layer and the second electrode, wherein the first electrode and the second electrode are electrically connected to an external power supply to generate an atmospheric pressure plasma to generate active species. The flexible active species generator has a plasma resistant function to prevent deformation and decomposition of an insulator caused by the plasma as well as an active species generating function from atmospheric pressure plasma, and has durability and safety, which is thus applicable to articles, foods, garments and human body in various forms.


