Flexible PMUT Array for Implantable Sensor Miniaturization

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Solution Overview

Problem

Conventional ultrasonic transducer devices are rigid and large, making them unsuitable for implantable or ingestible non-invasive imaging applications, and existing solutions fail to effectively integrate flexible ultrasonic transducers, integrated circuits, batteries, and printed circuit boards into a compact sensor device for such purposes.

Innovation Solution

A sensor device comprising a flexible piezoelectric micromechanical ultrasonic transducer array, integrated circuits, a battery, and a coupling material sealed within a capsule, which can be fabricated using existing tools and methods, allowing for flexible or rigid configurations suitable for implantable, ingestible, or wearable devices.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional ultrasonic transducer devices are used, then ultrasonic imaging function is achieved, but the device size is large and rigid

Engineering Contradiction:
Improvedevice sizeVSAvoiddevice rigidity
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The ultrasonic transducer array is divided into multiple individual PMUT elements that can be independently controlled. This segmentation allows the array to be flexible while maintaining imaging functionality, as each element can be small and the collective array can conform to curved surfaces or be implanted in compact spaces.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs flexible substrates and thin film structures to create a flexible PMUT array. The transducer elements are fabricated on flexible materials that allow the entire array to bend and conform to non-planar surfaces, eliminating the rigidity constraint while preserving the ultrasonic imaging capability.

Inventive Principle:
Principle #30Flexible shells and thin films

2Stability of the object's composition

If flexible PMUT array is used, then device flexibility is improved, but integration with electronics and power source becomes complex

Engineering Contradiction:
Improvedevice flexibilityVSAvoidintegration complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The patent integrates the PMUT array, electronics, and power source into a single unified flexible device structure. All components are mounted on flexible substrates and connected through flexible interconnects, merging previously separate rigid components into a cohesive flexible system that eliminates integration complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The flexible substrate serves multiple functions simultaneously: it supports the PMUT elements, provides mechanical flexibility, acts as a mounting platform for electronics, and serves as the interconnection medium. This multi-functionality reduces the number of separate components and simplifies the overall integration process.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Volume of moving object

If device size is reduced for implantable applications, then non-invasive imaging capability is achieved, but power retention becomes challenging

Engineering Contradiction:
Improvedevice sizeVSAvoidpower retention
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The patent uses photolithographic and other semiconductor fabrication techniques to create miniaturized versions of electronic components and power management circuits. These scaled-down copies of standard components maintain their functionality while occupying minimal space, enabling adequate power management in a compact implantable form factor.

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the creation of compact, lightweight sensor devices that can be used for non-invasive imaging and monitoring applications, supporting biocompatibility and long-term power retention with minimal self-discharge, suitable for implantation or ingestion.

Implementation Method 1

a piezoelectric micromechanical ultrasonic transducer (PMUT) array configured to transmit and receive ultrasonic signals

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP3423199B1Manufacturing method of a sensor device and corresponding sensor device
Publication Date: 2019.12.04 QUALCOMM INC
  • EP3423199B1 patent drawingFigure 1A~1B
  • EP3423199B1 patent drawingFigure 2A~2B
  • EP3423199B1 patent drawingFigure 3A~3B

AI summary

Embodiments of a sensor device and methods for manufacturing the same are disclosed. In one embodiment, a sensor device comprises a piezoelectric micromechanical ultrasonic transducer (PMUT) array configured to transmit and receive ultrasonic signals, where the PMUT array comprises a plurality of PMUTs and the PMUT array is flexible, one or more integrated circuits configured to process the ultrasonic signals, a battery configured to provide power to the PMUT array and the one or more integrated circuits, a coupling material configured to hold the PMUT array, the one or more integrated circuits, and the battery, and a capsule configured to seal the PMUT array, the one or more integrated circuits, the battery and the coupling material within the capsule.