Flexible Pressure Sensor Using Piezoresistive and Capacitive Detection
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Solution Overview
Problem
Conventional pressure sensors are not suitable for daily applications requiring cheap and disposable solutions, as they are often costly and not ideal for use in intelligent products needing flexible and low-voltage operation.
Innovation Solution
A pressure sensor is fabricated using a semiconductor material with a pressure-sensitive structure that changes electrical resistance in response to external pressure, comprising a flexible layer that deforms to alter the thickness of a dielectric material, affecting electrical capacitance and allowing for low-cost, flexible, and low-voltage operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing pressure sensor designs are used, then they can detect pressure changes, but they are not cost-effective and lack sensitivity for disposable or low-cost applications
Solution Approach 1:
The patent changes the electrical parameters of the current channel by applying pressure to the pressure-sensitive structure, which modulates the electrical characteristics (resistance, capacitance) of the channel. This allows pressure detection through electrical parameter changes rather than complex mechanical measurements, enabling low-cost fabrication while maintaining high sensitivity for disposable applications
Solution Approach 2:
The patent replaces complex mechanical pressure measurement systems with an electrical sensing mechanism. The pressure-sensitive structure converts mechanical pressure into electrical signal changes through capacitance and resistance variations in the current channel, eliminating the need for expensive mechanical transducers while achieving high sensitivity
2Ease of operation
If flexible and low-voltage device requirements are met, then disposable applications become feasible, but pressure detection sensitivity may be compromised
Solution Approach 1:
The patent employs flexible thin film structures for the pressure-sensitive structure and current channel. These thin film components maintain flexibility for disposable applications while enabling pressure detection through capacitance changes. The flexible dielectric material and deformable conductor layer work together to preserve sensitivity despite the flexible, low-voltage operation required for disposable devices
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the creation of low-cost, flexible, and low-voltage pressure sensors capable of detecting pressure changes with high sensitivity, suitable for intelligent products and daily applications, and can also detect temperature changes, eliminating the need for separate temperature sensors.
Implementation Method 1
the pressure sensitive structure is arranged to manipulate a first electrical characteristic of the electric current channel... the first electrical characteristic is an electrical resistance
Implementation Method 2
the electrical capacitance is changed according to a change of a thickness of the second layer of material... the third layer of material deforms at least partially so as to change the thickness of the second layer of material
Data Source
AI summary
An electric device for detecting pressure and a pressure sensor includes an electric current channel arranged to conduct an electric current, wherein the electric current channel is disposed adjacent or proximate to a pressure sensitive structure. Upon the pressure sensitive structure being subjected to a change of an external pressure, the pressure sensitive structure is arranged to manipulate a first electrical characteristic of the electric current channel.